Synthesis of sputtered thin films in low energy ion beams

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 65-72

  Howson, R P ^a,b  

^a LOUGHBOROUGH UNIVERSITY   (United Kingdom)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; ION BEAMS; ION BOMBARDMENT; MAGNETRONS; THIN FILMS;

LOW ENERGY;

MAGNETRON SPUTTERING;

EID: 0031546207     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00370-9     Document Type: Article

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