Diagnosing SiO2 contact etch stop with optical emission

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 659-663

  McNevin, S C ^a   Cerullo, M ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004458464     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580701     Document Type: Article

References (15)

1. Joseph S. Han, J. P. McVittie, and Jie Zhang, J. Vac. Sci. Technol. B 13, 1893 (1995).
2. D. J. Vitkavage, A. Kornblit, R. A. Nichols, D. P. Favreu, and S. McNevin, Tegal Plasma Proceedings Symposium, San Francisco (1991) (unpublished); reprinted in R. A. Gottscho, C. W. Jurgensen, and D. J. Vitkavage, J. Vac. Sci. Technol. B 10, 2133 (1992).
3. D. J. Vitkavage, A. Kornblit, R. A. Nichols, D. P. Favreu, and S. McNevin, Tegal Plasma Proceedings Symposium, San Francisco (1991) (unpublished); reprinted in R. A. Gottscho, C. W. Jurgensen, and D. J. Vitkavage, J. Vac. Sci. Technol. B 10, 2133 (1992).
4. J. C. Arnold and H. H. Sawin, J. Appl. Phys. 70, 5314 (1991).
5. Takashi Kinoshita, M. Hane, and J. P. McVittie, J. Vac. Sci. Technol. B 14, 560 (1996).
6. Takeshi Akimoto, H. Nanbu, and E. Ikawa, J. Vac. Sci. Technol. B 13, 2390 (1995).
7. S. C. McNevin, J. Vac. Sci. Technol. A 13, 797 (1995).
8. S. C. McNevin, K. V. Guinn, and J. Ashley Taylor, J. Vac. Sci. Technol. B (submitted).
9. H. Sugai, K. Nakamura, Y. Hikosaka, and M. Nakamura, J. Vac. Sci. Technol. A 13, 887 (1995).
10. Gerald Z. Yin, M. Ben-Dor, M. S. Chang, and T. O. Yep, J. Vac. Sci. Technol. A 7, 691 (1989).
11. Takeshi Akimoto, Shuichi Furuoya, Keiichi Harasima, and Eiji Ikawa, Jpn. J. Appl. Phys. 133, 2151 (1994).
12. K. Guinn, K. Tokashiki, S. C. McNevin, and M. Cerullo, J. Vac. Sci. Technol. A 14, 1137 (1996).
13. James A. O'Neill and Jyothi Singh, J. Appl. Phys. 77, 497 (1995).
14. O. Joubert, G. S. Oehrlein, S. Surendra, and Y. Zhang, J. Vac. Sci. Technol. A 12, 1957 (1994).
15. J. Marks, K. Collins, C. L. Yang, D. Groechel, P. Keswick, C. Cunningham, and M. Carlson, Proc. SPIE 25, 1803 (1992).