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Volumn 1999-Q, Issue , 1999, Pages 41-49

SUB-CONTINUUM SIMULATIONS OF HEAT CONDUCTION IN SILICON-ON-INSULATOR TRANSISTORS

Author keywords

[No Author keywords available]

Indexed keywords

BOLTZMANN EQUATION; DIFFUSION; PARTIAL DIFFERENTIAL EQUATIONS; PHONONS; SILICON ON INSULATOR TECHNOLOGY; TRANSISTORS;

EID: 0004312777     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece1999-1061     Document Type: Conference Paper
Times cited : (1)

References (31)
  • 2
    • 0040151682 scopus 로고    scopus 로고
    • Heat Transport in Dielectric Thin Films and at Solid-Solid Interfaces
    • Cahill, D. G., 1997, “Heat Transport in Dielectric Thin Films and at Solid-Solid Interfaces,” Microscale Thermophysical Engineering, Vol. l,pp. 85-109.
    • (1997) Microscale Thermophysical Engineering , vol.l , pp. 85-109
    • Cahill, D. G.1
  • 3
    • 0030449421 scopus 로고    scopus 로고
    • Nonlocal and Nonequilibrium Heat Conduction in the Vicinity of Nanoparticles
    • Chen, G., 1996, "Nonlocal and Nonequilibrium Heat Conduction in the Vicinity of Nanoparticles," Journal ofHeat Transfer, Vol. 118, pp. 539-545.
    • (1996) Journal ofHeat Transfer , vol.118 , pp. 539-545
    • Chen, G.1
  • 4
    • 0039702996 scopus 로고    scopus 로고
    • Size and Interface Effects on Thermal Conductivity of Superlattices and Periodic Thin-Film Structures
    • Chen, G., 1997, “Size and Interface Effects on Thermal Conductivity of Superlattices and Periodic Thin-Film Structures,” Journal ofHeat Transfer, Vol. 119, pp. 220-9.
    • (1997) Journal ofHeat Transfer , vol.119 , pp. 220-229
    • Chen, G.1
  • 5
    • 0025724767 scopus 로고
    • The Selection of Discrete Ordinate Quadrature Sets for Anisotropic Scattering
    • HTD-Vol AMSE New York, NY
    • Fiveland, W. A., 1991, "The Selection of Discrete Ordinate Quadrature Sets for Anisotropic Scattering," Fundamentals of Radiation Heat Transfer, HTD-Vol 160, AMSE New York, NY, pp. 89-96.
    • (1991) Fundamentals of Radiation Heat Transfer , vol.160 , pp. 89-96
    • Fiveland, W. A.1
  • 6
    • 0021979356 scopus 로고
    • On the Numerical Solution of Hyperbolic Heat Conduction
    • Glass, D., Ozisik, M., and McRae, D., 1985, "On the Numerical Solution of Hyperbolic Heat Conduction," Numerical Heat Transfer, Vol. 8, pp. 497-504.
    • (1985) Numerical Heat Transfer , vol.8 , pp. 497-504
    • Glass, D.1    Ozisik, M.2    McRae, D.3
  • 7
    • 0029356512 scopus 로고
    • Prediction and measurement of temperature fields in silicon-on-insulator electronic circuits
    • 1
    • Goodson, K. E., Flik, M. 1., Su, L. T., Antoniadis D. A., 1995, "Prediction and measurement of temperature fields in silicon-on-insulator electronic circuits," Journal of Heat Transfer, Vol. 117, pp. 574-81.
    • (1995) Journal of Heat Transfer , vol.117 , pp. 574-581
    • Goodson, K. E.1    Flik, M.2    Su, L. T.3    Antoniadis, D. A.4
  • 8
    • 0029676410 scopus 로고    scopus 로고
    • Thermal Conduction in Nonhomogeneous CVD Diamond Layers in Electronic Microstructures
    • Goodson, K. E., 1996, "Thermal Conduction in Nonhomogeneous CVD Diamond Layers in Electronic Microstructures," Journal ofHeat Transfer, Vol. 118, pp. 279-86
    • (1996) Journal ofHeat Transfer , vol.118 , pp. 279-286
    • Goodson, K. E.1
  • 9
    • 0004503252 scopus 로고    scopus 로고
    • Thermal Phenomena in Semiconductor Devices and Interconnects
    • Taylor & Francis, Washington, D.C
    • Goodson, K. E., Ju, Y.S., and Asheghi, M., 1998, “Thermal Phenomena in Semiconductor Devices and Interconnects,” Microscale Energy Transport, Taylor & Francis, Washington, D.C.
    • (1998) Microscale Energy Transport
    • Goodson, K. E.1    Ju, Y.S.2    Asheghi, M.3
  • 10
    • 0000766948 scopus 로고
    • Radiative Transport and Wall Temperature Slip in an Absorbing Planar Medium
    • Heaslet, M. A. and Warming, R. F., 1965, “Radiative Transport and Wall Temperature Slip in an Absorbing Planar Medium,” International Journal ofHeat and Mass Transfer, Vol. 8, pp. 979-984.
    • (1965) International Journal ofHeat and Mass Transfer , vol.8 , pp. 979-984
    • Heaslet, M. A.1    Warming, R. F.2
  • 11
    • 36149027857 scopus 로고
    • Analysis of Lattice Thermal Conductivity
    • Holland, M. G., 1963, “Analysis of Lattice Thermal Conductivity,” Phys. Rev., Vol. 132, pp. 2461-2471.
    • (1963) Phys. Rev , vol.132 , pp. 2461-2471
    • Holland, M. G.1
  • 12
    • 0002916786 scopus 로고    scopus 로고
    • Transient Ballistic and Diffusive Phonon Heat Transport in Thin Films
    • Joshi, A. and Majumdar, A., “Transient Ballistic and Diffusive Phonon Heat Transport in Thin Films,” Journal of Applied Physics, Vol.74, pp. 31-39.
    • Journal of Applied Physics , vol.74 , pp. 31-39
    • Joshi, A.1    Majumdar, A.2
  • 13
    • 0031344842 scopus 로고    scopus 로고
    • Impact of Phonon Dispersion upon the Size Effect on Thermal Conduction along Thin Semiconductor Films
    • Dallas, TX, DSC-Vol
    • Ju, Y. S. and Goodson, K. E., 1997, “Impact of Phonon Dispersion upon the Size Effect on Thermal Conduction along Thin Semiconductor Films,” Proc. ASME International Mechanical Engineering Congress and Exposition, Dallas, TX, DSC-Vol. 62, pp. 181-190.
    • (1997) Proc. ASME International Mechanical Engineering Congress and Exposition , vol.62 , pp. 181-190
    • Ju, Y. S.1    Goodson, K. E.2
  • 15
    • 0001246055 scopus 로고    scopus 로고
    • Phonon Scattering in Silicon Films with Thickness of Order 100 nm
    • Ju, Y. S. and Goodson K.E., 1999a, "Phonon Scattering in Silicon Films with Thickness of Order 100 nm," Applied Physics Letters, Vol. 74, pp. 3005-3007.
    • (1999) Applied Physics Letters , vol.74 , pp. 3005-3007
    • Ju, Y. S.1    Goodson, K.E.2
  • 16
  • 18
    • 0003921180 scopus 로고
    • 7rd ed., John Wiley & Sons, Inc., New York
    • Kreysig, E., 1993, Advanced Engineering Mathematics, 7rd ed., John Wiley & Sons, Inc., New York, pp. 1061-63.
    • (1993) Advanced Engineering Mathematics , pp. 1061-1063
    • Kreysig, E.1
  • 19
    • 0001187605 scopus 로고    scopus 로고
    • Concurrent Thermal and Electrical Modeling of Sub-Micrometer Silicon Devices
    • Lai, J. and Majumdar, A., “Concurrent Thermal and Electrical Modeling of Sub-Micrometer Silicon Devices,” Journal of Applied Physics, Vol.79, pp. 7353-61.
    • Journal of Applied Physics , vol.79 , pp. 7353-7361
    • Lai, J.1    Majumdar, A.2
  • 21
    • 0000061661 scopus 로고
    • The Transport of Heat Between Dissimilar Solids at Low Temperatures
    • Little, W. A., 1959, “The Transport of Heat Between Dissimilar Solids at Low Temperatures,” Canadian Journal of Physics, Vol. 37, pp. 334-349.
    • (1959) Canadian Journal of Physics , vol.37 , pp. 334-349
    • Little, W. A.1
  • 22
    • 71749104133 scopus 로고
    • Microscale Heat Conduction in Dielectric Thin Films
    • Majumdar, A., 1993, "Microscale Heat Conduction in Dielectric Thin Films," Journal ofHeat Transfer, Vol. 115, pp. 7-16.
    • (1993) Journal ofHeat Transfer , vol.115 , pp. 7-16
    • Majumdar, A.1
  • 23
    • 0032001963 scopus 로고    scopus 로고
    • Application of Diffuse Mismatch Theory to the Prediction of Thermal Boundary Resistance in Thin-Film High-Tj Superconductors
    • Phelan, P. E., 1998, “Application of Diffuse Mismatch Theory to the Prediction of Thermal Boundary Resistance in Thin-Film High-Tj Superconductors,” Journal ofHeat Transfer, Vol. 120, pp. 37-43.
    • (1998) Journal ofHeat Transfer , vol.120 , pp. 37-43
    • Phelan, P. E.1
  • 24
    • 0031102960 scopus 로고    scopus 로고
    • Heat Flow Analysis for EOS/ESD Protection Device Design in SOI Technology
    • Raha, P., Ramaswamy, S., Rosenbaum, E., 1997, "Heat Flow Analysis for EOS/ESD Protection Device Design in SOI Technology," IEEE Transactions on Electron Devices, Vol. 44, pp. 464-471.
    • (1997) IEEE Transactions on Electron Devices , vol.44 , pp. 464-471
    • Raha, P.1    Ramaswamy, S.2    Rosenbaum, E.3
  • 26
    • 84933207793 scopus 로고
    • The Mean Free Path of Electrons in Metals
    • Sondheimer, E. H., 1952, "The Mean Free Path of Electrons in Metals," Advances in Physics. Vol. 1. No. 1.
    • (1952) Advances in Physics , vol.1 , Issue.1
    • Sondheimer, E. H.1
  • 27
    • 0000214582 scopus 로고
    • Low-Temperature Specific Heat and Thermal Conductivity of Noncrystalline Solids
    • Stephens, R. B., 1973, “Low-Temperature Specific Heat and Thermal Conductivity of Noncrystalline Solids,” Physical Review B, Vol. 8, pp. 2896-2905.
    • (1973) Physical Review B , vol.8 , pp. 2896-2905
    • Stephens, R. B.1
  • 29
    • 0025512595 scopus 로고
    • Rigorous Thermodynamic Treatment of Heat Generation and Conduction in Semiconductor Device Modeling
    • Wachutka, G. K., 1990, “Rigorous Thermodynamic Treatment of Heat Generation and Conduction in Semiconductor Device Modeling,” IEEE Transactions on Computer-Aided Design, Vol. 9, pp. 1141-1149.
    • (1990) IEEE Transactions on Computer-Aided Design , vol.9 , pp. 1141-1149
    • Wachutka, G. K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.