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Volumn 84, Issue 1, 1998, Pages 572-576

Role of the plasma in the growth of amorphous carbon films by pulsed laser deposition

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EID: 0002970069     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368062     Document Type: Article
Times cited : (9)

References (21)
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    • Y. A. Bykovskii, N. N. Degtyarenko, V. F. Elesin, V. E. Kondrashov, E. E. Lovetskii, A. N. Plyanichev, and V. S. Fetisov, Sov. Phys. Tech. Phys. 19, 43 (1974); Rev. Mod. Phys. 59, S119 (1987); R. W. Dreyfus, J. Appl. Phys. 69, 1721 (1991).
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    • D. R. McKenzie, D. Mueller, and B. A. Pailthorpe, Phys. Rev. Lett. 67, 773 (1991); P. J. Fallon, V. S. Veerasamy, C. A. Davis, J. Robertson, G. A. J. Amaratunga, W. I. Milne, and J. Koskinen, Phys. Rev. B 48, 4777 (1993).
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    • McKenzie, D.R.1    Mueller, D.2    Pailthorpe, B.A.3
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    • H. Mai and W. Pompe, Appl. Surf. Sci. 54, 215 (1992); S. Hopfe, N. Kallis, H. Mai, W. Pompe, R. Scholz, S. Völlmar, B. Wehner, and P. Weissbrodt, J. Anal. Chem. Sci 14, 346 (1993).
    • (1992) Appl. Surf. Sci. , vol.54 , pp. 215
    • Mai, H.1    Pompe, W.2
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    • J. D. Swift and M. J. R. Schwar, Electrical Probes for Plasma Diagnostics (Iliffe, London, 1970); D. W. Koopman, Phys. Fluids 14, 1707 (1971); S. B. Segall and D. W. Koopman, ibid. 16, 1149 (1973).
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    • Koopman, D.W.1
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    • 0000841003 scopus 로고
    • J. D. Swift and M. J. R. Schwar, Electrical Probes for Plasma Diagnostics (Iliffe, London, 1970); D. W. Koopman, Phys. Fluids 14, 1707 (1971); S. B. Segall and D. W. Koopman, ibid. 16, 1149 (1973).
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    • Segall, S.B.1    Koopman, D.W.2
  • 14
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    • P. T. Rumsby and J. W. M. Paul, Plasma Phys. 16, 247 (1974); D. H. Lowndes, D. B. Geogehan, A. A. Puretzky, D. P. Norton, and C. M. Rouleau, Science 273, 898 (1996).
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