SCOPUS 정보 검색 플랫폼

Chemical Vapor Deposition

Volumn 8, Issue 2, 2002, Pages 74-78

Low-temperature MOCVD of conducting, micrometer-thick, silver films

(6) Samoilenkov, Sergej a Stefan, Madalina a Wahl, Georg a Paramonov, Sergej b Kuzmina, Natalia b Kaul, Andrey b

a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG (Germany)

b MOSCOW STATE UNIVERSITY (Russian Federation)

Author keywords

Films: Silver; MOCVD; Silver

Indexed keywords

EID: 0001904176 PISSN: 09481907 EISSN: None Source Type: Journal
DOI: 10.1002/1521-3862(20020304)8:2<74::AID-CVDE74>3.0.CO;2-B Document Type: Article

Times cited : (28)

References (48)

1
- 0011758314
- D. R. Smith, F. R. Fickett, J. Res. Natl. Inst. Stand. Technol. 1995, 100, 119.
- (1995) J. Res. Natl. Inst. Stand. Technol. , vol.100 , pp. 119
- Smith, D.R.¹ Fickett, F.R.²

2
- 0034318903
- S. Y. Lu, Y.-Z. Lin, Thin Solid Films 2000, 376, 67.
- (2000) Thin Solid Films , vol.376 , pp. 67
- Lu, S.Y.¹ Lin, Y.-Z.²

3
- 0033335817
- J. N. Keuler, L. Lorenzen, R. D. Sanderson, V. Prozesky, W. J. Przybylowicz, Nucl. Instrum. Methods Phys. Res. B 1999, 158, 678.
- (1999) Nucl. Instrum. Methods Phys. Res. B , vol.158 , pp. 678
- Keuler, J.N.¹ Lorenzen, L.² Sanderson, R.D.³ Prozesky, V.⁴ Przybylowicz, W.J.⁵

4
- 0000315801
- E. Ando, S. Suzuki, N. Aomine, M. Miyazaki, M. Tada, Vacuum 2000, 59, 792.
- (2000) Vacuum , vol.59 , pp. 792
- Ando, E.¹ Suzuki, S.² Aomine, N.³ Miyazaki, M.⁴ Tada, M.⁵

5
- 0035154309
- M. Arbab, Thin Solid Films 2001, 381, 15.
- (2001) Thin Solid Films , vol.381 , pp. 15
- Arbab, M.¹

6
- 0033138329
- M. Bartek, J. H. Correia, R. F. Wolffenbuttel, J. Micromech. Microeng. 1999, 9, 162.
- (1999) J. Micromech. Microeng. , vol.9 , pp. 162
- Bartek, M.¹ Correia, J.H.² Wolffenbuttel, R.F.³

7
- 0041731505
- K. Baba, K. Yamaki, M. Miyagi, Appl. Opt. 1999, 38, 2564.
- (1999) Appl. Opt. , vol.38 , pp. 2564
- Baba, K.¹ Yamaki, K.² Miyagi, M.³

8
- 0031648249
- L. A. Ageev, V. K. Miloslavsky, A. Nahal, Pure Appl. Opt. 1998, 7, L1.
- (1998) Pure Appl. Opt. , vol.7
- Ageev, L.A.¹ Miloslavsky, V.K.² Nahal, A.³

9
- 0034262482
- M. Jergel, A. Anopchenko, E. Majkova, M. Spasova, S. Luby, V. Holy, M. Brunel, A. Luches, M. Martino, Thin Solid Films 2000, 373, 216.
- (2000) Thin Solid Films , vol.373 , pp. 216
- Jergel, M.¹ Anopchenko, A.² Majkova, E.³ Spasova, M.⁴ Luby, S.⁵ Holy, V.⁶ Brunel, M.⁷ Luches, A.⁸ Martino, M.⁹

10
- 0034497839
- F. Chemam, A. Bouabellou, R. Halimi, Thin Solid Films 2000, 380, 266.
- (2000) Thin Solid Films , vol.380 , pp. 266
- Chemam, F.¹ Bouabellou, A.² Halimi, R.³

11
- 0038273488
- Y. L. Zou, T. L. Alford, Y. Zeng, F. Deng, S. S. Lau, T. Laursen, A. I. Amali, B. M. Ullrich, J. Appl. Phys. 1997, 82, 3321.
- (1997) J. Appl. Phys. , vol.82 , pp. 3321
- Zou, Y.L.¹ Alford, T.L.² Zeng, Y.³ Deng, F.⁴ Lau, S.S.⁵ Laursen, T.⁶ Amali, A.I.⁷ Ullrich, B.M.⁸

12
- 0032116308
- D. Babonneau, T. Cabioc'h, A. Naudon, J. C. Girard, M. F. Denanot, Surf. Sci. 1998, 409, 358.
- (1998) Surf. Sci. , vol.409 , pp. 358
- Babonneau, D.¹ Cabioc'h, T.² Naudon, A.³ Girard, J.C.⁴ Denanot, M.F.⁵

13
- 0032620928
- R. Kalyanaraman, S. Oktyabrsky, J. Narayan, J. Appl. Phys. 1999, 85, 6636.
- (1999) J. Appl. Phys. , vol.85 , pp. 6636
- Kalyanaraman, R.¹ Oktyabrsky, S.² Narayan, J.³

14
- 0032203089
- M. V. Jacob, J. Mazierska, J. Kim, K.-Y. Kang, G. P. Srivastava, Supercond. Sci. Technol. 1998, 11, 1217.
- (1998) Supercond. Sci. Technol. , vol.11 , pp. 1217
- Jacob, M.V.¹ Mazierska, J.² Kim, J.³ Kang, K.-Y.⁴ Srivastava, G.P.⁵

15
- 0010244314
- A. Srivastava, D. Kumar, R. K. Singh, H. Venkataraman, W. R. Eisenstadt, Phys. Rev. B: Condens. Matter. 2000, 61, 7305.
- (2000) Phys. Rev. B: Condens. Matter. , vol.61 , pp. 7305
- Srivastava, A.¹ Kumar, D.² Singh, R.K.³ Venkataraman, H.⁴ Eisenstadt, W.R.⁵

16
- 0000918161
- A. M. Flank, R. Delaunay, P. Lagarde, M. Pompa, J. Jupille, Phys. Rev. B: Condens. Matter. 1996, 53, R1737.
- (1996) Phys. Rev. B: Condens. Matter. , vol.53
- Flank, A.M.¹ Delaunay, R.² Lagarde, P.³ Pompa, M.⁴ Jupille, J.⁵

17
- 0032066714
- Y. F. Zhukovskii, M. Alfredsson, K. Hermansson, E. Heifets, E. A. Kotomin Nucl. Instrum. Methods Phys. Res. B 1998, 141, 73.
- (1998) Nucl. Instrum. Methods Phys. Res. B , vol.141 , pp. 73
- Zhukovskii, Y.F.¹ Alfredsson, M.² Hermansson, K.³ Heifets, E.⁴ Kotomin, E.A.⁵

18
- 0026855642
- X. H. Xu, C. L. Hussey, J. Electrochem. Soc. 1992, 139, 1295.
- (1992) J. Electrochem. Soc. , vol.139 , pp. 1295
- Xu, X.H.¹ Hussey, C.L.²

19
- 0011406152
- Y. Yonezawa, A. Takami, T. Sato, K. Yamamoto, T. Sasanuma, H. Ishida, A. Ishitani, J. Appl. Phys. 1990, 68, 1297.
- (1990) J. Appl. Phys. , vol.68 , pp. 1297
- Yonezawa, Y.¹ Takami, A.² Sato, T.³ Yamamoto, K.⁴ Sasanuma, T.⁵ Ishida, H.⁶ Ishitani, A.⁷

20
- 0030382212
- J. Uchil, K. Mohan Rao, M. Pattabi, J. Phys. D: Appl. Phys. 1996, 29, 2992.
- (1996) J. Phys. D: Appl. Phys. , vol.29 , pp. 2992
- Uchil, J.¹ Mohan Rao, K.² Pattabi, M.³

21
- 0032378132
- D. Abriou, D. Gagnot, J. Jupille, F. Creuzet, Surf. Rev. Lett. 1998, 5, 387.
- (1998) Surf. Rev. Lett. , vol.5 , pp. 387
- Abriou, D.¹ Gagnot, D.² Jupille, J.³ Creuzet, F.⁴

22
- 0033726245
- R. Dannenberg, E. A. Stach, J. R. Groza, B. J. Dresser, Thin Solid Films 2000, 370, 54.
- (2000) Thin Solid Films , vol.370 , pp. 54
- Dannenberg, R.¹ Stach, E.A.² Groza, J.R.³ Dresser, B.J.⁴

23
- 0032496507
- F.-L. Yang, R. E. Somekh, A. L. Greer, Thin Solid Films 1998, 322, 46.
- (1998) Thin Solid Films , vol.322 , pp. 46
- Yang, F.-L.¹ Somekh, R.E.² Greer, A.L.³

24
- 0032096903
- A. C. Carter, W. Chang, S. B. Quadri, J. S. Horwitz, R. Leuchtner, D. B. Chrisey, J. Mater. Res. 1998, 13, 1418.
- (1998) J. Mater. Res. , vol.13 , pp. 1418
- Carter, A.C.¹ Chang, W.² Quadri, S.B.³ Horwitz, J.S.⁴ Leuchtner, R.⁵ Chrisey, D.B.⁶

25
- 0000053767
- G. Renaud, P. Guénard, A. Barbier, Phys. Rev. B: Condens. Matter. 1998, 58, 7310.
- (1998) Phys. Rev. B: Condens. Matter. , vol.58 , pp. 7310
- Renaud, G.¹ Guénard, P.² Barbier, A.³

26
- 0001724958
- R. J. H. Voorhoeve, J. W. Merewether, J. Electrochem. Soc. 1972, 119, 364.
- (1972) J. Electrochem. Soc. , vol.119 , pp. 364
- Voorhoeve, R.J.H.¹ Merewether, J.W.²

27
- 0026924272
- M. J. Shapiro, W. J. Lackey, J. A. Hanigofsky, D. N. Hill, W. B. Carter, E. K. Barefield, J. Alloys Compd. 1992, 187, 331.
- (1992) J. Alloys Compd. , vol.187 , pp. 331
- Shapiro, M.J.¹ Lackey, W.J.² Hanigofsky, J.A.³ Hill, D.N.⁴ Carter, W.B.⁵ Barefield, E.K.⁶

28
- 0345928821
- Anonymous, Res. Discl. 1986, 265, 146.
- (1986) Discl. , vol.265 , pp. 146

29
- 0000082616
- C. D. M. Beverwijk, G. J. M. van der Kerk, A. J. Leusink, J. Noltes, J. Organomet. Chem. Rev. 1970, 5, 215.
- (1970) J. Organomet. Chem. Rev. , vol.5 , pp. 215
- Beverwijk, C.D.M.¹ Van Der Kerk, G.J.M.² Leusink, A.J.³ Noltes, J.⁴

30
- 0024889848
- C. Oehr, H. Suhr, Appl. Phys. A - Mater. Sci. Process. 1989, 49, 691.
- (1989) Appl. Phys. A - Mater. Sci. Process , vol.49 , pp. 691
- Oehr, C.¹ Suhr, H.²

31
- 0000344760
- Z. Yuan, N. H. Dryen, J. J. Vittal, R. J. Puddephatt, Chem. Mater. 1995, 7, 1696.
- (1995) Chem. Mater. , vol.7 , pp. 1696
- Yuan, Z.¹ Dryen, N.H.² Vittal, J.J.³ Puddephatt, R.J.⁴

32
- 0000328226
- N. H. Dryden, J. J. Vittal, R. J. Puddephatt, Chem. Mater. 1993, 5, 765.
- (1993) Chem. Mater. , vol.5 , pp. 765
- Dryden, N.H.¹ Vittal, J.J.² Puddephatt, R.J.³

33
- 37049088114
- Z. Yuan, N. H. Dryden, X. Li, J. J. Vittal, R. J. Puddephatt, J. Mater. Chem. 1995, 5, 303.
- (1995) J. Mater. Chem. , vol.5 , pp. 303
- Yuan, Z.¹ Dryden, N.H.² Li, X.³ Vittal, J.J.⁴ Puddephatt, R.J.⁵

34
- 0001554059
- K.-M. Chi, K.-H. Chen, S.-M. Peng, G.-H. Lee, Organometallics 1996, 15, 2575.
- (1996) Organometallics , vol.15 , pp. 2575
- Chi, K.-M.¹ Chen, K.-H.² Peng, S.-M.³ Lee, G.-H.⁴

35
- 0032803087
- D. A. Edwards, R. M. Harker, M. F. Mahon, K. C. Molloy, J. Mater. Chem. 1999, 9, 1771.
- (1999) J. Mater. Chem. , vol.9 , pp. 1771
- Edwards, D.A.¹ Harker, R.M.² Mahon, M.F.³ Molloy, K.C.⁴

36
- 0345928819
- S. Paramonov, S. Samoilenkov, S. Papucha, I. Malkerova, A. Alikhanyan, N. Kuzmina, S. Troyanov, A. Kaul, J. Phys. IV 2001, 11, 645.
- (2001) J. Phys. Iv , vol.11 , pp. 645
- Paramonov, S.¹ Samoilenkov, S.² Papucha, S.³ Malkerova, I.⁴ Alikhanyan, A.⁵ Kuzmina, N.⁶ Troyanov, S.⁷ Kaul, A.⁸

37
- 0028523514
- C. Xu, M. J. Hampden-Smith, T. T. Kodas, Adv. Mater. 1994, 6, 746.
- (1994) Adv. Mater. , vol.6 , pp. 746
- Xu, C.¹ Hampden-Smith, M.J.² Kodas, T.T.³

38
- 0000825279
- C. Xu, M. J. Hampden-Smith, T. T. Kodas, Chem. Mater. 1995, 7, 1539.
- (1995) Chem. Mater. , vol.7 , pp. 1539
- Xu, C.¹ Hampden-Smith, M.J.² Kodas, T.T.³

39
- 0001542904
- C. Xu, M. J. Hampden-Smith, T. T. Kodas, E. N. Duesler, A. L. Rheingold, G. Yap, Inorg. Chem. 1995, 34, 4767.
- (1995) Inorg. Chem. , vol.34 , pp. 4767
- Xu, C.¹ Hampden-Smith, M.J.² Kodas, T.T.³ Duesler, E.N.⁴ Rheingold, A.L.⁵ Yap, G.⁶

40
- 0001030807
- P. M. Jeffries, S. R. Wilson, G. S. Girolami, J. Organomet. Chem. 1993, 449, 203.
- (1993) J. Organomet. Chem. , vol.449 , pp. 203
- Jeffries, P.M.¹ Wilson, S.R.² Girolami, G.S.³

41
- 0141774524
- E. Szlyk, P. Piszczek, A. Grodzicki, M. Chaberski, A. Golinski, J. Szatkowski, T. Blaszczyk, Chem. Vap. Deposition 2001, 7, 111.
- (2001) Chem. Vap. Deposition , vol.7 , pp. 111
- Szlyk, E.¹ Piszczek, P.² Grodzicki, A.³ Chaberski, M.⁴ Golinski, A.⁵ Szatkowski, J.⁶ Blaszczyk, T.⁷

42
- 0001144904
- K.-M. Chi, Y.-H. Lu, Chem. Vap. Deposition 2001, 7, 117.
- (2001) Chem. Vap. Deposition , vol.7 , pp. 117
- Chi, K.-M.¹ Lu, Y.-H.²

43
- 0347820181
- N. Kuzmina, S. Paramonov, R. Ivanov, V. Kezko, K. Polamo, S. Troyanov, J. Phys. IV 1999, 9, 923.
- (1999) J. Phys. IV , vol.9 , pp. 923
- Kuzmina, N.¹ Paramonov, S.² Ivanov, R.³ Kezko, V.⁴ Polamo, K.⁵ Troyanov, S.⁶

44
- 0034315831
- D. Fuks, S. Dorfman, E. A. Kotomin, Y. F. Zhukovskii, A. M. Stoneham, Phys. Rev. Lett. 2000, 85, 4333.
- (2000) Phys. Rev. Lett. , vol.85 , pp. 4333
- Fuks, D.¹ Dorfman, S.² Kotomin, E.A.³ Zhukovskii, Y.F.⁴ Stoneham, A.M.⁵

45
- 0032494895
- S. Kundu, S. Hazra, S. Banerjee, M. K. Sanyal, S. K. Mandal, S. Chaudhuri, A. K. Pal, J. Phys. D: Appl. Phys. 1998, 31, L73.
- (1998) J. Phys. D: Appl. Phys. , vol.31
- Kundu, S.¹ Hazra, S.² Banerjee, S.³ Sanyal, M.K.⁴ Mandal, S.K.⁵ Chaudhuri, S.⁶ Pal, A.K.⁷

46
- 0000669696
- S. B. Arnason, S. P. Herschfield, A. F. Hebard, Phys. Rev. Lett. 1998, 81, 3936.
- (1998) Phys. Rev. Lett. , vol.81 , pp. 3936
- Arnason, S.B.¹ Herschfield, S.P.² Hebard, A.F.³

47
- 0004198374
- Nauka, Moscow, in Russian
- E. K. Kazenas, Y. V. Tsvetkov, The Evaporation of Oxides, Nauka, Moscow, 1997 (in Russian).
- (1997) The Evaporation of Oxides
- Kazenas, E.K.¹ Tsvetkov, Y.V.²

48
- 0346559889
- S. V. Samoylenkov, O. Y. Gorbenko, I. E. Graboy, A. R. Kaul, Y. D. Tretyakov, J. Mater. Chem. 1996, 6, 627.
- (1996) J. Mater. Chem. , vol.6 , pp. 627
- Samoylenkov, S.V.¹ Gorbenko, O.Y.² Graboy, I.E.³ Kaul, A.R.⁴ Tretyakov, Y.D.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.