248 nm laser interaction studies on MgF2/LaF3 optical coatings by mass spectroscopy and x-ray photoelectron spectroscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2714, Issue , 1996, Pages 405-415

  Bodemann, Axel ^a   Kaiser, Norbert ^a   Raupach, L ^b   Weissbrodt, Peter ^b   Hacker, Erich J ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b JENOPTIK Laser Optik Systeme GmbH   (Germany)

Author keywords

Conditioning; Excimer laser; Fluoride multilayer coatings; Mass spectroscopy; XPS

Indexed keywords

BOND STRENGTH (CHEMICAL); CHEMICAL BONDS; COATINGS; EMISSION SPECTROSCOPY; EXCIMER LASERS; GAS LASERS; IRRADIATION; LASER BEAM EFFECTS; LASER DAMAGE; LASERS; MASS SPECTROMETERS; MASS SPECTROMETRY; MULTILAYERS; OPTICAL COATINGS; OPTICAL MATERIALS; OPTICAL MULTILAYERS; OXYGEN; PHOTOELECTRON SPECTROSCOPY; SURFACE ANALYSIS; SURFACES;

248 NM EXCIMER LASERS; COATING MATERIALS; COATING SURFACES; CONDITIONING; FLUORIDE MULTILAYER COATINGS; HR COATINGS; IN COMPOSITIONS; IN DEPENDENCES; LASER INTERACTIONS; LASER IRRADIATIONS; MASS SPECTROSCOPY; OPTICAL SETUPS; OXYGEN ATMOSPHERES; QUADRUPOLE MASS SPECTROMETERS; SAMPLE DESIGNS; SAMPLE SURFACES; X-RAY PHOTOELECTRON SPECTROSCOPIES; XPS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0001763868     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.240361     Document Type: Conference Paper

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