Influence of interfacial copper on the room temperature oxidation of silicon

Journal of Applied Physics

Volumn 79, Issue 4, 1996, Pages 2074-2078

  Alford, T L ^a   Jaquez, E J ^a   Theodore, N David ^a,c   Russell, S W ^a,d   Diale, M ^a   Adams, D ^a   Anders, Simone ^b  

^a ARIZONA STATE UNIVERSITY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c MOTOROLA INC   (United States)

^d TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000243369     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361064     Document Type: Article

References (18)

1. Jian Li, Y. Shacham-Diamand, and J. W. Mayer, Mater. Sci. Rep. 9, 1 (1992).
2. J. M. E. Harper, A. Charai, L. Stoitz, F. M. D'Heurle, and P. M. Fryer, Appl. Phys. Lett. 56, 2519 (1990).
3. A. Hiraki, E. Lugujjo, and J. W. Mayer, J. Appl. Phys. 43, 3643 (1972).
4. C. A. Hewett and S. S. Lau, Appl. Phys. Lett. 50, 827 (1987).
5. C. Cytermann, R. Brener, E. Sacher, B. Pratt, and R. Weil, Appl. Phys. Lett. 52, 191 (1988).
6. D. M. Follstaedt and S. W. Myers, Mater. Res. Soc. Symp. Proc. 316, 27 (1994).
7. A. Anders, S. Anders, I. G. Brown, M. R. Dickinson, and R. A. MacGill, J. Vac. Sci. Technol. B 12, 815 (1994).
8. W.-K. Chu, J. W. Mayer, and M. A. Nicolet, Backscattering Spectrometry (Academic, New York, 1978).
9. L. R. Doolittle, Nucl. Instrum. Methods B 9, 344 (1985).
10. R. C. Dorward and J. S. Kirkaldy, Trans Met. Soc. 242, 2055 (1968).
11. S-M. Myers, D. M. Follstaedt, and D. M. Bishop, Mater. Res. Soc. Symp. Proc. 316, 33 (1994).
12. T. L. Alford, D. Adams, J. Li, B. Cao, S. W. Russell, S. Q. Hong, R. L. Spreitzer, and J. W. Mayer, Conference Proceedings ULSI-IX [Mat. Res. Soc. 10, 101 (1994)].
13. C. S. Liu and L. J. Chen, J. Appl. Phys. 75, 2730 (1994).
14. B. E. Deal and A. S. Grove, J. Appl. Phys. 36, 3770 (1965).
15. J. Li, J. W. Mayer, L. J. Matienzo, and F. Emmi, Mat. Chem. Phys. 32, 390 (1992).
16. G. C. Bond, Catalysis by Metals (Academic, London, 1962).
17. J. T. Richardson, Principles of Catalyst Development (Plenum, New York, 1989).
18. Y. K. Rao, Stoichiometry and Thermodynamics of Metallurgical Processes (Cambridge University Press, Cambridge, 1985).