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Journal of Applied Physics
Volumn 69, Issue 11, 1991, Pages 7620-7626
Influence of Cu on the native oxide growth of Si
(4)
Graf D
a
Grundner, M
a
Muhlhoff L
b
Dellith, M
b
a
WACKER CHEMIE AG
(
Germany
)
b
SIEMENS AG
(
Germany
)
Author keywords
[No Author keywords available]
Indexed keywords
EID
:
0001622707
PISSN
:
00218979
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1063/1.347531
Document Type
:
Article
Times cited : (
27
)
References (
23
)
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