Reaction of Al with ammonia by pulsed laser ablation: Optical analysis and mass spectrometry

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 122, Issue 3, 1997, Pages 423-426

  Di Palma, T M ^a   Flamini, C ^a   Orlando, S ^b   Teghil, R ^c   Guidoni, A Giardini ^a,b   Mele, A ^a  

^a SAPIENZA UNIVERSITY OF ROME   (Italy)

^b CNR   (Italy)

^c UNIVERSITY OF BASILICATA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; AMMONIA; CHARGE COUPLED DEVICES; DEPOSITION; EMISSION SPECTROSCOPY; FILM PREPARATION; IMAGING TECHNIQUES; LASER ABLATION; MASS SPECTROMETRY; PLASMAS; PULSED LASER APPLICATIONS; THIN FILMS;

ALUMINUM NITRIDE FILMS; INTENSIFIED CHARGE COUPLED DEVICE IMAGING; LASER EVAPORATED ALUMINUM; LASER PLASMA FORMATION; OPTICAL MULTICHANNEL EMISSION SPECTROSCOPY (OMA);

NITRIDES;

EID: 0031546574     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00573-3     Document Type: Article

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