Interaction of gas-phase atomic chlorine with a silicon surface: Reactions on bare and hydrogen-chemisorbed surface sites

Journal of Chemical Physics

Volumn 111, Issue 22, 1999, Pages 10261-10274

  Ree, J ^a,b   Shin, H K ^a  

^a UNIVERSITY OF NEVADA   (United States)

^b Chonnam National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001555910     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.480375     Document Type: Article

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