Direct reaction of gas-phase atomic hydrogen with chemisorbed chlorine atoms on a silicon surface

Journal of Chemical Physics

Volumn 108, Issue 23, 1998, Pages 9821-9834

  Kim, Y H ^a,b   Ree, J ^a,c   Shin, H K ^a  

^a UNIVERSITY OF NEVADA   (United States)

^b Inha University   (South Korea)

^c Chonnam National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000224756     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.476457     Document Type: Article

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