Nanofabrication via atom optics

Applied Surface Science

Volumn 141, Issue 3-4, 1999, Pages 210-218

  Bradley, C C ^a   Anderson, W R ^a   McClelland, J J ^a   Celotta, R J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

03.75.Be; 42.50.Vk; 66.10.Cb; 81.10.Bk; APN; Atom lithography; Atom optics; Chromium; CN; Laser focused atomic deposition; NAD; Nanofabrication; Nanostructures

Indexed keywords

EID: 0001523128     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00507-8     Document Type: Article

References (21)

1. Timp G., Behringer R.E., Tennant D.M., Cunningham J.E., Prentiss M., Berggren K.K. Phys. Rev. Lett. 69:1992;1636.
2. McClelland J.J., Scholten R.E., Palm E.C., Celotta R.J. Science. 262:1993;877.
3. Drodofsky U., Stuhler J., Brezger B., Schulze Th., Drewsen M., Pfau T., Mlynek J. Microelectron. Eng. 35:1997;285.
4. Gupta R., McClelland J.J., Jabbour Z.J., Celotta R.J. Appl. Phys. Lett. 67:1995;1378.
5. Drodofsky U., Stuhler J., Schulze Th., Drewsen M., Brezger B., Pfau T., Mlynek J. Appl. Phys. B. 65:1997;755.
6. McGowan R.W., Giltner D.M., Lee S.A. Opt. Lett. 20:1995;2535.
7. Gordon J.P., Ashkin A. Phys. Rev. A. 21:1980;1606.
8. McClelland J.J. J. Opt. Soc. Am. B. 12:1995;1763.
9. Dalibard J., Cohen-Tannoudji C. J. Opt. Soc. Am. B. 6:1989;2023.
10. Scholten R.E., Gupta R., McClelland J.J., Celotta R.J., Levenson M.S., Vangel M.G. Phys. Rev. A. 55:1997;1331.
11. W.R. Anderson, C.C. Bradley, J.J. McClelland, R.J. Celotta (manuscript in preparation).
12. Gupta R., McClelland J.J., Jabbour Z.J., Celotta R.J. Appl. Phys. Lett. 67:1995;1378.
13. Gupta R., McClelland J.J., Marte P., Celotta R.J. Phys. Rev. Lett. 76:1996;4689.
14. Tulchinsky D.A., Kelley M.H., McClelland J.J., Gupta R., Celotta R.J. J. Vac. Sci. Technol. A. 16:1998;1817.
15. Scheinfein M.R., Unguris J., Kelley M.H., Pierce D.T., Celotta R.J. Rev. Sci. Instrum. 61:1990;2501.
16. McClelland J.J., Gupta R., Celotta R.J., Porkolab G.A. Appl. Phys. B. 66:1998;95.
17. Goyal D., King A.H., Bilello J.C. Mat. Res. Symp. Proc. 108:1988;395.
18. Villain J. J. Phys. I (France). 1:1994;19.
19. Elkinani I., Villain J. J. Phys. I (France). 4:1994;949.
20. Bradley C.C., Anderson W.R., McClelland J.J., Celotta R.J. Bull. Am. Phys. Soc. 43:1998;1291.
21. Fujitsa J., Morinaga M., Kishimoto T., Yasuda M., Matsui S., Shimizu F. Nature. 380:1996;691.