Lateral force measurements in a scanning force microscope with piezoresistive sensors

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 636-639

  Brugger, J ^a   Burger, J ^a   Binggeli, M ^a   Imura, R ^a   de Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FORCE MEASUREMENT; INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; MICROSCOPIC EXAMINATION; NATURAL FREQUENCIES; RESISTORS; STRESS CONCENTRATION;

BENDING SPRING CONSTANT; FRICTION MODE; MICROSCOPE CANTILEVER BEAM; PIEZORESISTIVE PRINCIPLE; SCANNING FORCE MICROSCOPE; SILICON CANTILEVER; TORSIONAL SENSITIVITY;

SILICON SENSORS;

EID: 0029488602     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)