Self-excited force sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 632-635

  Itoh, Toshihiro ^a   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; FORCE MEASUREMENT; GOLD; PIEZOELECTRIC MATERIALS; SILICA; THIN FILMS; ZINC OXIDE;

DEFLECTION SENSING; FORCE SENSING MICROCANTILEVERS; PIEZOELECTRIC THIN FILMS; SCANNING FORCE MICROSCOPY;

PIEZOELECTRIC TRANSDUCERS;

EID: 0029517662     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)