Semiconductor wafer bonding via liquid capillarity

Applied Physics Letters

Volumn 77, Issue 5, 2000, Pages 651-653

  Liau, Z L ^a  

^a MIT LINCOLN LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001420362     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.127074     Document Type: Article

References (15)

1. See, for example, E. Yablonovitch, D. M. Hwang, T. J. Gmitter, L. T. Florez, and J. P. Harbison, Appl. Phys. Lett. 56, 2419 (1990).
2. V. Lehman, K. Mitani, R. Stengl, T. Mii, and U. Gosele, Jpn. J. Appl. Phys., Part 2 28, L2141 (1989).
3. Z. L. Liau and D. E. Mull. Appl. Phys. Lett. 56, 737 (1990).
4. Y. H. Lo, R. Bhat, D. M. Hwang, C. Chua, and C-H. Lin, Appl. Phys. Lett. 62, 1038 (1993).
5. D. I. Babić, J. J. Dudley, K. Streubel, R. P. Mirin, J. E. Bowers, and E. L. Hu, Appl. Phys. Lett. 66, 1030 (1995).
6. A. R. Hawkins, W. Wu, P. Abraham, K. Streubel, and J. E. Bowers, Appl. Phys. Lett. 70, 303 (1997).
7. L. Gordon, G. L. Woods, R. C. Eckardt, R. R. Route, R. S. Feigelson, M. M. Fejer, and R. L. Byer, Electron. Lett. 29, 1942 (1993).
8. F. A. Kish, F. M. Steranka, D. C. DeFevere, D. A. Vanderwater, K. G. Park, C. P. Kuo, T. D. Osentowski, M. J. Peanasky, J. G. Yu, R. M. Fletcher, D. A. Steigerwald, M. G. Craford, and V. M. Robbins, Appl. Phys. Lett. 64, 2839 (1994).
9. Y. Okuno, M. Aoki, T. Tsuchiya, and K. Uomi, Appl. Phys. Lett. 67, 810 (1995).
10. G. Patriarche, F. Jeannès, J.-L. Oudar, and F. Glas, J. Appl. Phys. 82, 4892 (1997).
11. Z. L. Liau, B. F. Aull, J. P. Donnelly, S. H. Groves, and G. W. Turner (unpublished).
12. See, for example, R. P. Feynman, R. B. Leighton, and M. Sands, The Feynman Lectures on Physics (Addison-Wesley, Reading, MA, 1964), Vol. 2, Chap. 38, p. 9.
13. See, for example, A. Sommerfeld, Mechanics of Deformable Bodies (Academic, New York, 1950), p. 122.
14. See, for example, W. A. Harrison, Electronic Structure and the Properties of Solids (Freeman, San Francisco, CA, 1980), p. 196.
15. American Institute of Physics Handbook, edited by D. E. Gray (McGraw-Hill, New York, 1972), Chap. 2 p. 207.