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Volumn 70, Issue 5, 1997, Pages 607-609
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Fabrication of buried epitaxial CoSi2 layer through selective diffusion
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0001373034
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.118288 Document Type: Article |
Times cited : (13)
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References (19)
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