Measurement of Thin Film Mechanical Properties Using Nanoindentation

MRS Bulletin

Volumn 17, Issue 7, 1992, Pages 28-33

  Pharr, G M ^a   Oliver, W C ^a  

^a NONE

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EID: 84971928468     PISSN: 08837694     EISSN: 19381425     Source Type: Journal    
DOI: 10.1557/S0883769400041634     Document Type: Article

References (60)

1. W.C. Oliver, MRS Bulletin 11 (1986) p. 15.
2. W.D. Nix, Matall. Trans. 20A (1989) p. 2217.
3. W.C. Oliver and C.J. McHargue, Thin Solid Films 161 (1988) p. 117.
4. B.D. Fabes and W.C. Oliver, in Thin Films: Stresses and Mechanical Properties 11, edited by M.F. Doerner, WC. Oliver, G.M. Pharr, and F.R. Brotzen (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990) p. 127.
5. M.E. O’Hern, W.C. Oliver, C.J. McHargue, D.S. Rickerby, and S.J. Bull, in Thin Films: Stresses and Mechanical Properties 11, edited by M.E Doerner, WC. Oliver, G.M. Pharr, and ER. Brotzen (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990) p. 139.
6. P.J. Burnett and D.S. Rickerby, Thin Solid Films 148 (1987) p. 51.
7. M. Nastasi, J-P. Hirvonen, T.R. Jervis, G.M. Pharr, and W.C. Oliver, J. Mater. Res. 3 (1988)p. 226.
8. T.R. Jervis, J-P. Hirvonen, M. Nastasi, T.G. Zocco, J.R. Martin, G.M. Pharr, and W.C. Oliver, New Materials Approaches to Tribology: Theory and Applications, edited by L.E. Pope, L. Fehrenbacher, and W.O. Winer (Mater. Res. Soc. Symp. Proc. 140, Pittsburgh, PA, 1989) p. 189.
9. M.M. Khruschov and E.S. Berkovich, Industrial Diamond Review 11 (1951) p. 42.
10. T.P. Weihs, S. Hong, J.C. Bravman, and W.D. Nix, J. Mater. Res. 3 (1988) p. 931.
11. S. Hong, T.P. Weihs, J.C. Bravman, and WD. Nix, J. Elec. Mater. 19 (1990) p. 903.
12. J.B. Pethica, R. Hutchings, and W.C. Oliver, Philos. Mag. A 48 (1983) p. 593.
13. W.C. Oliver, R. Hutchings, and J.B. Pethica, in Microindentation Techniques in Materials Science and Engineering (ASTM STP 889), edited by P.J. Blau and B.R. Lawn (American Society for Testing and Materials, Philadelphia, PA, 1986) p. 90.
14. F. Fröhlich, P. Grau, and W. Grellmann, Phys. Status Solidi A 42 (1977) p. 79.
15. J.B. Pethica, in Ion Implantation into Metals, edited by V. Ashworth, W. Grant, and R. Procter (Pergamon Press, Exford, 1982) p. 147-156.
16. W.C. Oliver, C.J. McHargue, and S.J. Zinkle, Thin Solid Films 153 (1987) p. 185
17. T. Sata, K. Takamoto, and H. Yoshikawa, Bull. Jpn. Soc. Prec. Engg. 13 (1969) p. 3.
18. D. Newey, M.A. Wilkens, and H.M. Pollock, J. Phys. E 15 (1982) p. 119.
19. D. Stone, W.R. LaFontaine, P. Alexopolous, T.-W. Wu, and Che-Yu L.I., J. Mater. Rcs. 3 (1988) p. 141.
20. N. Gane and J.M. Cox, Philos. Mag. 22 (1970) p. 881.
21. Standard Test for Microhardness of Materials, ASTM Standard Test Method E-384, Annual Book of Standards 3.01 (American Society for Testing and Materials, Philadelphia, PA, 1989) p. 469.
22. M.F. Doerner, D.S. Gardner, and W.D. Nix, J. Mater. Res. 1 (1987) p. 845.
23. H.M. Pollock, D. Maugis, and M. Barquins, in Microindentation Techniques in Materials Science and Engineering (ASTM STP 889), edited by P.J. Blau and B.R. Lawn (American Society for Testing and Materials, Philadelphia, PA, 1986) p. 47.
24. D. Lebouvier, P. Gilormini, and E. Felder, J. Phys. D 18 (1985) p. 199.
25. J.L. Loubet, J.M. Georges, O. Marchesini, and G. Meille, J. Tribology 106 (1984) p. 43.
26. M.F. Doerner and W.D. Nix, J. Mater. Res. 1 (1986) p. 601.
27. W.C. Oliver and G.M. Pharr, J. Mater. Res., 7 (1992) p. 1564.
28. M.K. Shorshorov, S.I. Bulychev, and V.P. Alekhin, Sov Phys. Dokl. 26 (1982) p. 769.
29. S.I. Bulychev, V.P. Alekhin, M.K. Shorshorov, A.P. Ternovskii, and G.D. Shnyrev, Zavod. Lab. 41 (1975) p. 1137.
30. D. Tabor, Proc. R. Soc. London, Ser. A 192 (1948) p. 247
31. N.A. Stillwell and D. Tabor, Proc. Phys. Soc. London 78 (1961) p. 169.
32. I.N. Sneddon, Int. J. Eng. Sci. 3 (1965) p. 47.
33. G.M. Pharr, W.C. Oliver, and F.R. Brotzen, J. Mater. Res. 7 (1992).
34. G. Simmons and H. Wang, Single Crystal Elastic Constants and Calculated Aggregate Properties: A Handbook 2nd ed. (The M.I.T. Press, Cambridge, Massachusetts, 1971).
35. J.B. Pethica and WC. Oliver, Physica Scripta T 19 (1987) p. 61.
36. J.B. Pethica and WC. Oliver, in Thin Films: Stresses and Mechanical Properties, edited by J.C. Bravman, W.D. Nix, D.M. Barnett, and D.A. Smith (Mater. Res. Soc. Symp. Proc. 130, Pittsburgh, PA, 1989) p. 13.
37. W.C. Oliver and J.B. Pethica, U.S. Patent No. 4,848,141 (July 1989).
38. T.P. Weihs J.B. Pethica Mater. Res. Soc. Symp. Proc. in press.
39. R.B. King, Int. J. Solids Structures 23 (1987) p. 1657.
40. D.S. Stone, J. Elec. Packaging 41 (1990) p. 112.
41. D.S. Stone, TW Wu, P-S. Alexopoulos, and W.R. LaFontaine, in Thin Films: Stresses and Mechanical Properties, edited by J.C. Bravman, WD. Nix, D.M. Barnett, and D.A. Smith (Mater. Res. Soc. Symp. Proc. 130, Pittsburgh, PA, 1989) p. 105.
42. A.K. Bhattacharya and W.D. Nix, Int. J. Solids Structures 24 (1988) p. 1287.
43. B.D. Fabes, WC. Oliver, R.A. McKee, and F.J. Walker, submitted.
44. S.P. Baker, A.F. Jankowski, S. Hong, and W.D. Nix, in Thin Films: Stresses and Mechanical Properties II, edited by M.F. Doerner, W.C. Oliver, G.M. Pharr, and F.R. Brotzen (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990) p. 289.
45. T.R. Simes, S.G. Mellor, and D.A. Hills, J. Strain Analysis 19 (1984) p. 135.
46. F.H. Vitovec, in Microindentation Techniques in Materials Science and Engineering (ASTM STP 889), edited by P.J. Blau and B.R. Lawn (American Society for Testing and Materials, Philadelphia, PA, 1986) p. 175.
47. W.R. LaFontaine, B. Yost, and Che-Yu L.I., J. Mater. Res. 5 (1990) p. 776.
48. W.R. LaFontaine, C.A. Paszkiet, M.A. Kohronen, and Che-Yu Li, J. Mater. Res. 6 (1991) p. 2084.
49. M.J. Mayo and W.D. Nix, in Proceedings of the 8th International Conference on the Strength of Metals and Alloys, edited by P.O. Kettunen, T.K. Lepisto, and M.E. Lehtonen (Pergamon Press, New York, 1988) p. 1415.
50. M.J. Mayo and W.D. Nix, Acta Metall. 36 (1988) p. 2183.
51. M.J. Mayo, RW. Siegel, A. Narayanasamy, and WD. Nix, J. Mater. Res. 5 (1990) p. 1073.
52. V. Raman and R. Berriche, in Thin Films: Stresses and Mechanical Properties 11, edited by M.F. Doerner, W.C. Oliver, G.M. Pharr, and F.R. Brotzen (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990) p. 171.
53. B.N. Lucas and W.C. Oliver, Mater. Res. Soc. Symp. Proc., in press.
54. W.R. LaFontaine, B. Yost, R.D. Black, and Che-Yu L.I.,). Mater. Res. 5 (1990) p. 2100.
55. W.R. LaFontaine, B. Yost, R.D. Black, and Che-Yu L.I., in Thin Films: Stresses and Mechanical Properties 11, edited by M.F. Doerner, W.C. Oliver, G.M. Pharr, and ER. Brotzen (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990) p. 165.
56. D. Stone, W. LaFontaine, S. Ruoff, S-P. Hannula, B. Yost, and Che-Yu Li, in Electronic Packaging Materials Science 11, edited by K.A. Jackson, R.C. Pohanka, D.R. Uhlmann, and D.R. Ulrich (Mater. Res. Soc. Symp. Proc. 72, Pittsburgh, PA, 1986) p. 171.
57. T.W. Wu, J. Mater. Res. 6 (1991) p. 407.
58. T.W. Wu, A.L. Shull, and J. Lin, in Thin Films: Stresses and Mechanical Properties 11, edited by M.F. Doerner, W.C. Oliver, G.M. Pharr, and F.R. Brotzen (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990) p. 207.
59. S. Venkataraman, D.L. Kohlstedt, and W.W. Gerberich, Mater. Res. Soc. Symp. Proc., in press.
60. M.V. Swain, Mater. Res. Soc. Symp. Proc., in press.