Large core (∼60 μm) SOI multimode waveguides for optical interconnect

IEEE Photonics Technology Letters

Volumn 8, Issue 9, 1996, Pages 1196-1198

  Eng, T T H ^a   Ho, J Y L ^a   Chan, P W L ^a   Kan, S C ^a,b   Wong, G K L ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b IEEE

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FABRICATION; INTEGRATED CIRCUITS; INTEGRATED OPTICS; LIGHT PROPAGATION; OPTICAL INTERCONNECTS; PHOTOLITHOGRAPHY; PLASMA ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SUBSTRATES; WAVEGUIDE COUPLERS;

BOND AND ETCHBACK SILICON ON INSULATOR; MULTIMODE WAVEGUIDES; PROPAGATION LOSS;

OPTICAL WAVEGUIDES;

EID: 0030242835     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.531834     Document Type: Article

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