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Volumn 15, Issue 3, 1997, Pages 505-518

Silicon electro-optic modulator based on a three terminal device integrated in a low-loss single-mode SOI waveguide

Author keywords

Integrated optoelectronics; Optical communication; Optical modulation; Optical planar waveguide; Optoelectronic devices

Indexed keywords

ELECTROOPTICAL DEVICES; FINITE DIFFERENCE METHOD; INTEGRATED OPTOELECTRONICS; LIGHT MODULATION; OPTICAL COMMUNICATION; OPTICAL WAVEGUIDES; OPTOELECTRONIC DEVICES; REFRACTIVE INDEX; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DIODES; SILICON ON INSULATOR TECHNOLOGY;

EID: 0031104368     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/50.557567     Document Type: Article
Times cited : (130)

References (33)
  • 1
    • 0027887558 scopus 로고
    • Silicon-based optoelectronics
    • Dec.
    • R. A. Soref, "Silicon-based optoelectronics," in Proc. IEEE, vol. 81, pp. 1687-1706, Dec. 1993.
    • (1993) Proc. IEEE , vol.81 , pp. 1687-1706
    • Soref, R.A.1
  • 2
    • 0001854658 scopus 로고
    • 1.3 μm electro-optic silicon switch
    • J. P. Lorenzo and R. A. Soref, "1.3 μm electro-optic silicon switch," Appl. Phys. Lett., vol. 51, no. 1, pp. 6-8, 1987.
    • (1987) Appl. Phys. Lett. , vol.51 , Issue.1 , pp. 6-8
    • Lorenzo, J.P.1    Soref, R.A.2
  • 3
    • 0013021322 scopus 로고
    • All-silicon integrated optical modulator for 1.3 μm fiber-optic interconnects
    • B. R. Hemenway, O. Solgaard, and D. M. Bloom, "All-silicon integrated optical modulator for 1.3 μm fiber-optic interconnects," Appl. Phys. Lett., vol. 55, no. 4, pp. 349-350, 1989.
    • (1989) Appl. Phys. Lett. , vol.55 , Issue.4 , pp. 349-350
    • Hemenway, B.R.1    Solgaard, O.2    Bloom, D.M.3
  • 4
    • 0026172963 scopus 로고
    • Silicon optical modulator at 1.3 μm based on free-carrier absorption
    • G. V. Treyz, P. G. May, and J. M. Halbout, "Silicon optical modulator at 1.3 μm based on free-carrier absorption," IEEE Electron. Device Lett., vol. 12, pp. 276-278, 1991.
    • (1991) IEEE Electron. Device Lett. , vol.12 , pp. 276-278
    • Treyz, G.V.1    May, P.G.2    Halbout, J.M.3
  • 5
    • 0000540420 scopus 로고
    • Silicon Mach-Zehnder waveguide interferometerrs based on the plasma dispersion effect
    • G. V. Treyz, P. G. May, and J. M. Halbout, "Silicon Mach-Zehnder waveguide interferometerrs based on the plasma dispersion effect," Appl. Phys. Lett., vol. 59, no. 7, pp. 771-773, 1991.
    • (1991) Appl. Phys. Lett. , vol.59 , Issue.7 , pp. 771-773
    • Treyz, G.V.1    May, P.G.2    Halbout, J.M.3
  • 7
    • 0028274336 scopus 로고
    • Silicon 1 × 2 digital optical switch using plasma dispersion
    • Y. L. Liu, E. K. Liu, S. L. Zhang, G. Z. Li, and J. S. Luo, "Silicon 1 × 2 digital optical switch using plasma dispersion," Electron. Lett., vol. 30, no. 2, pp. 130-131, 1994.
    • (1994) Electron. Lett. , vol.30 , Issue.2 , pp. 130-131
    • Liu, Y.L.1    Liu, E.K.2    Zhang, S.L.3    Li, G.Z.4    Luo, J.S.5
  • 8
    • 0028407050 scopus 로고
    • Novel silicon waveguide switch based on total internal reflection
    • Y. Liu, E. Liu, G. Li, S. Zhang, and J. Luo, "Novel silicon waveguide switch based on total internal reflection," Appl. Phys. Lett., vol. 64, no. 16, pp. 2079-2080, 1994.
    • (1994) Appl. Phys. Lett. , vol.64 , Issue.16 , pp. 2079-2080
    • Liu, Y.1    Liu, E.2    Li, G.3    Zhang, S.4    Luo, J.5
  • 9
    • 0029277410 scopus 로고
    • Highly efficient optical phase modulator in SOI waveguides
    • C. K. Tang and G. T. Reed, "Highly efficient optical phase modulator in SOI waveguides," Electron. Lett., vol. 31, no. 6, pp. 451-452, 1995.
    • (1995) Electron. Lett. , vol.31 , Issue.6 , pp. 451-452
    • Tang, C.K.1    Reed, G.T.2
  • 10
    • 0029390504 scopus 로고
    • Silicon on insulator Mach-Zehnder waveguide interferometer operating at 1.3 μm
    • C. Z. Zhao, G. Z. Li, E. K. Liu, Y. Gao, and X. D. Liu, "Silicon on insulator Mach-Zehnder waveguide interferometer operating at 1.3 μm," Appl. Phys. Lett., vol. 67, no. 17, pp. 2448-2449, 1995.
    • (1995) Appl. Phys. Lett. , vol.67 , Issue.17 , pp. 2448-2449
    • Zhao, C.Z.1    Li, G.Z.2    Liu, E.K.3    Gao, Y.4    Liu, X.D.5
  • 11
    • 0026254845 scopus 로고
    • New possibilities for efficient silicon integrated electro-optical modulators
    • G. Cocorullo, F. Della Corte, I. Rendina, and A. Cutolo, "New possibilities for efficient silicon integrated electro-optical modulators," Optics Commun., vol. 86, pp. 228-235, 1991.
    • (1991) Optics Commun. , vol.86 , pp. 228-235
    • Cocorullo, G.1    Della Corte, F.2    Rendina, I.3    Cutolo, A.4
  • 12
    • 0023108359 scopus 로고
    • Electrooptical effects in silicon
    • R. A. Soref and B. R. Bennett, "Electrooptical effects in silicon," IEEE J. Quantum Electron., vol. QE-23, pp. 123-129, 1987.
    • (1987) IEEE J. Quantum Electron. , vol.QE-23 , pp. 123-129
    • Soref, R.A.1    Bennett, B.R.2
  • 13
  • 15
    • 0000479397 scopus 로고
    • Simulation studies of silicon electro-optic waveguide devices
    • S. R. Giguere, L. Friedman, R. A. Soref, and J. P. Lorenzo, "Simulation studies of silicon electro-optic waveguide devices," J. Appl. Phys., vol. 68, no. 10, pp. 4964-4970, 1990.
    • (1990) J. Appl. Phys. , vol.68 , Issue.10 , pp. 4964-4970
    • Giguere, S.R.1    Friedman, L.2    Soref, R.A.3    Lorenzo, J.P.4
  • 16
    • 0027107111 scopus 로고
    • Thermo-optical modulation at 1.5 μm in silicon etalon
    • G. Cocorullo and I. Rendina, "Thermo-optical modulation at 1.5 μm in silicon etalon," Electron. Lett., vol. 28, pp. 83-85, 1992.
    • (1992) Electron. Lett. , vol.28 , pp. 83-85
    • Cocorullo, G.1    Rendina, I.2
  • 17
    • 0022734632 scopus 로고
    • All silicon active and passive guided-wave components for λ = 1.3 μm and 1.6 μm
    • R. A. Soref and J. P. Lorenzo, "All silicon active and passive guided-wave components for λ = 1.3 μm and 1.6 μm," IEEE J. Quantum Electron., vol. QE-22, pp. 873-879, 1986.
    • (1986) IEEE J. Quantum Electron. , vol.QE-22 , pp. 873-879
    • Soref, R.A.1    Lorenzo, J.P.2
  • 18
    • 84975539372 scopus 로고
    • Optical waveguides in oxygen-implanted buried oxide silicon-on-insulator structures
    • B. N. Kurdi and D. G. Hall, "Optical waveguides in oxygen-implanted buried oxide silicon-on-insulator structures," Opt. Lett., vol. 13, pp. 175-177, 1988.
    • (1988) Opt. Lett. , vol.13 , pp. 175-177
    • Kurdi, B.N.1    Hall, D.G.2
  • 19
    • 0026883754 scopus 로고
    • Low loss planar optical waveguides fabricated in SIMOX material
    • A. Rickman, G. T. Reed, B. L. Weiss, and F. Namavar, "Low loss planar optical waveguides fabricated in SIMOX material," IEEE Photon. Technol. Lett., vol. 4, pp. 633-635, 1992.
    • (1992) IEEE Photon. Technol. Lett. , vol.4 , pp. 633-635
    • Rickman, A.1    Reed, G.T.2    Weiss, B.L.3    Namavar, F.4
  • 21
    • 0027274129 scopus 로고
    • The bipolar mode FET: A new power device combining FET with BJT operation
    • P. Spirito, G. V. Persiano, and A. G. M. Strollo, "The bipolar mode FET: A new power device combining FET with BJT operation," Microelectron. J., vol. 24, pp. 61-74, 1993.
    • (1993) Microelectron. J. , vol.24 , pp. 61-74
    • Spirito, P.1    Persiano, G.V.2    Strollo, A.G.M.3
  • 22
    • 0025521041 scopus 로고
    • Two-dimensional analysis of the I-V characteristics of normally-off bipolar-mode FET devices
    • P. Spirito, A. G. M. Strollo, and A. Caruso, "Two-dimensional analysis of the I-V characteristics of normally-off bipolar-mode FET devices," Solid State Electron., vol. 33, pp. 1401-1417, 1990.
    • (1990) Solid State Electron. , vol.33 , pp. 1401-1417
    • Spirito, P.1    Strollo, A.G.M.2    Caruso, A.3
  • 24
    • 3843065599 scopus 로고
    • Ph.D. dissertation. Delft Univ. Technol., Delft, The Netherlands
    • M. K. Smit, "Integrated optics," Ph.D. dissertation. Delft Univ. Technol., Delft, The Netherlands, 1991.
    • (1991) Integrated Optics
    • Smit, M.K.1
  • 26
    • 0026204795 scopus 로고
    • Low-loss singlemode optical waveguides with large cross-section in silicon-on-insulator
    • J. Schmidtchen, A. Splett, B. Schuppert, K. Petermann, and G. Burbach, "Low-loss singlemode optical waveguides with large cross-section in silicon-on-insulator," Electron. Lett., vol. 27, pp. 1486-1488, 1991.
    • (1991) Electron. Lett. , vol.27 , pp. 1486-1488
    • Schmidtchen, J.1    Splett, A.2    Schuppert, B.3    Petermann, K.4    Burbach, G.5
  • 27
    • 3843055331 scopus 로고
    • New formulation of the BPM based on the slowly varying envelope approximation
    • H. J. W. M. Hoekstra, G. J. Krijnen, and P. V. Lambeck, "New formulation of the BPM based on the slowly varying envelope approximation," Opt. Commun., vol. 97, pp. 310-303, 1993.
    • (1993) Opt. Commun. , vol.97 , pp. 310-1303
    • Hoekstra, H.J.W.M.1    Krijnen, G.J.2    Lambeck, P.V.3
  • 28
    • 0003547182 scopus 로고
    • TMA Inc., Palo Alto, CA
    • MEDICI User's Manual, TMA Inc., Palo Alto, CA, 1992.
    • (1992) MEDICI User's Manual
  • 29
    • 0028481866 scopus 로고
    • Low-loss, single-mode, optical phase modulator in SIMOX material
    • Aug.
    • C. K. Tang, G. T. Reed, A. J. Walton, and A. G. Rickman, "Low-loss, single-mode, optical phase modulator in SIMOX material," J. Lightwave Technol., vol. 12, pp. 1394-1400, Aug. 1994.
    • (1994) J. Lightwave Technol. , vol.12 , pp. 1394-1400
    • Tang, C.K.1    Reed, G.T.2    Walton, A.J.3    Rickman, A.G.4
  • 30
    • 3843089086 scopus 로고
    • Silicon double-injection electro-optic modulator with junction gate control
    • L. Friedman, R. A. Soref, and J. P. Lorenzo, "Silicon double-injection electro-optic modulator with junction gate control," J. Appl. Phys., vol. 63, no. 6, pp. 1831-1839, 1988.
    • (1988) J. Appl. Phys. , vol.63 , Issue.6 , pp. 1831-1839
    • Friedman, L.1    Soref, R.A.2    Lorenzo, J.P.3
  • 32
    • 0023981236 scopus 로고
    • Guided-wave intensity modulator using amplitude-and-phase perturbations
    • Mar.
    • R. A. Soref, D. L. McDaniel, and B. R. Bennett, "Guided-wave intensity modulator using amplitude-and-phase perturbations," J. Lightwave Technol., vol. 6, pp. 437-444, Mar. 1988.
    • (1988) J. Lightwave Technol. , vol.6 , pp. 437-444
    • Soref, R.A.1    McDaniel, D.L.2    Bennett, B.R.3
  • 33
    • 3843139078 scopus 로고
    • An SOI lateral BMFET for power IC applications
    • Sevilla, Spain
    • S. D. Kim, J. H. Kim, C. M. Yun, M. K. Han, and Y. I. Choi, "An SOI lateral BMFET for power IC applications," in Proc. EPE'95, Sevilla, Spain, 1995, vol. 2, pp. 240-244.
    • (1995) Proc. EPE'95 , vol.2 , pp. 240-244
    • Kim, S.D.1    Kim, J.H.2    Yun, C.M.3    Han, M.K.4    Choi, Y.I.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.