Surface morphology of homoepitaxially grown (111), (001), and (110) diamond studied by low energy electron diffraction and reflection high-energy electron diffraction

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 2991-3002

  Nishitani Gamo, Mikka ^a   Loh, Kian Ping ^a   Sakaguchi, Isao ^a   Takami, Tomohide ^b   Kusunoki, Isao ^b   Ando, Toshihiro ^a  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001301614     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581972     Document Type: Article

References (28)

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10. The appearance of Kikuchi patterns of diamond structure (111) surface enable us to judge the direction of crystal azimuth. For an incident beam parallel to the [101] azimuth, the Kikuchi patterns exhibit asymmetric features, as shown in Fig. 4(a). This asymmetry yields a different structure in the Kikuchi patterns for the [121] and [211] azimuths; for the [121] azimuth, 026 and 620 Kikuchi lines can be observed, while they are not observed for the [211] azimuth, as reported by K. Hayakawa and N. Aizawa, in the case of RHEED observation on Si(111) surface [Jpn. J. Appl. Phys., Part 1 21, 1105 (1982)]. This asymmetrical structure of RHEED Kikuchi patterns permits the identification of these two azimuths. In our observations [Fig. 4(b)], the crystal azimuth was [121], as determined from the appearance of the 026 and 620 Kikuchi lines.
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26. Although our homoepitaxial C(001) surface was flat and smooth com pared with those previously reported, its coherency was not as good as that of the Si(001) surface. This is evident by comparing our RHEED patterns with those reported by Ichikawa and Ino [Surf. Sci. 85, 221 (1979)]. This is also the case for the (111) surface compared with those reported by Ino [Jpn. J. Appl. Phys., Part 1 16, 891 (1977)].
27. Although our homoepitaxial C(001) surface was flat and smooth com pared with those previously reported, its coherency was not as good as that of the Si(001) surface. This is evident by comparing our RHEED patterns with those reported by Ichikawa and Ino [Surf. Sci. 85, 221 (1979)]. This is also the case for the (111) surface compared with those reported by Ino [Jpn. J. Appl. Phys., Part 1 16, 891 (1977)].
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