Evolution of defect-related structure in the x-ray absorption spectra of buried SiNx films

Applied Physics Letters

Volumn 71, Issue 22, 1997, Pages 3209-3211

  Paloura, E C ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001246925     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120292     Document Type: Article

References (12)

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