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Volumn 266-269 A, Issue , 2000, Pages 190-194

Hydrogen at compact sites in hot-wire chemical vapour deposited polycrystalline silicon films

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[No Author keywords available]

Indexed keywords

EID: 0001207295 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/s0022-3093(99)00813-3 Document Type: Article

Times cited : (24)

References (12)

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