Filtration of Sub-100 nm Particles Using a Bulk-Micromachined, Direct-Bonded Silicon Filter

Biomedical Microdevices

Volumn 1, Issue 2, 1999, Pages 113-119

  Tu, Jay K ^a   Huen, Tony ^a   Szema, Robert ^a   Ferrari, Mauro ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

BioMEMS; Bioseparation; Filter; MEMS; Micromachining

Indexed keywords

EID: 0001102437     PISSN: 13872176     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1009944423778     Document Type: Article

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