Silicon-micromachined direct-pore filters for ultrafiltration

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2978, Issue , 1997, Pages 111-122

  Chu, Wen Hwa ^a   Huen, Tony ^a   Tu, Jay K ^a   Ferrari, Mauro ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Filtration; Immuno isolation; Microelectro mechanical system; Micromachining; Semi permeable membrane; Silicon filter; Ultrafiltration

Indexed keywords

COMPOSITE MICROMECHANICS; ETHANOL; MACHINING; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MICROFILTRATION; MICROMACHINING; NONMETALS; POROUS MATERIALS; ULTRAFILTRATION; WATER FILTRATION;

DI WATERS; ETHANOL SOLUTIONS; FILTRATION FLUXES; FLUORESCENT PARTICLES; IMMUNO-ISOLATION; LOG REDUCTIONS; MICROELECTRO-MECHANICAL-SYSTEM; MICROMACHINED; PRECISE CONTROLS; SACRIFICIAL OXIDES; SEMI-PERMEABLE MEMBRANE; SILICON LAYERS; SILICON STRUCTURES;

FILTRATION;

EID: 0005483423     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.269961     Document Type: Conference Paper

References (9)

1. W. C. McGregor, Membrane Separations in Biotechnology, Marcel Dekker, New York, 1986.
2. G. Kittilsland, G. Stemme, B. Norden, Sensors and Actuators, A21-A23, (1990) p.904-907.
3. J. Brody and P. Yager, "Low Reynolds Number Micro-Fluidic Devices", in Solid-State Sensor and Actuator Workshop, p.105-108, 1996.
4. W. Chu and M. Ferrari, "Microfabricated Filter with Specially Constructed Channel Walls, and Containment Well and Capsule Constructed with such Filters", U.S. application Serial No. 08/663,644. 1996 patent pending.
5. W. Chu and M. Ferrari, "Silicon nanofilter with absolute pore size and high mechanical strength", Microrobotics and Micromechanical Systems, SPIE Proc., Vol. 2593. p. 9-20, 1995.
6. M. Ferrari, W. Chu, T. Desai, D. Hansford, G. Mazzoni, T. Huen, and M. Zhang, "Silicon Nanotechnology for Biofiltration and Immuno-isolated Cell Xenografts", MRS Proc., Vol .414, p.101-106, 1995.
7. Y. Duvault-Herrera, N. Jaffrezic-Renault, P. Clechert, et. al., "Quantitative Study of the Hydroxylation and of the Chemical Grafting of Oxidized Porous Silicon", Colloids and Surface, Vol. 50, p.197-206, 1990.
8. W. C. McGregor Ed. Membrane Separations in Biotechnology, Marcel Dekker, New York, p36l-371, 1986.
9. A. DiLeo, A. Allegrezza, and S. Builder, "High Resolution Removal of Virus from Protein Solutions Using a Membrane of Unique Structure", Biotechnology, Vol.10. p.182-188, 1992.