Characterization of bulk-micromachined, direct-bonded silicon nanofilters

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3258, Issue , 1998, Pages 148-155

  Tu, Jay K ^a   Huen, Tony ^a   Szema, Robert ^a   Ferrari, Mauro ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

BioMEMS; Bioseparation; Microfabrication; Micromachining; Nanofilters; Silicon

Indexed keywords

FABRICATION; MEDICAL APPLICATIONS; MICROMACHINING; PORE SIZE; SILICON WAFERS;

NANOFILTERS;

NANOFILTRATION;

EID: 0032225883     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.304374     Document Type: Conference Paper

References (7)

1. A sub-micron particle filter in silicon
2. Silicon-micromachined direct-pore filters for ultrafiltration
3. A planar microfabricated fluid filter
4. Low reynolds number micro-fluidic devices
5. Microfiltration membrane sieve with silicon micromachining for industrial and biomedical applications
6. Microfabricated biocapsules for cell xenografts: A review
7. The controlled etching of silicon in catalyzed ethylenediamine-pyrocatechol-water solutions