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Volumn 5, Issue 4, 1999, Pages 191-193
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Precursor selection in halide CVD of oxides
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0001066075
PISSN: 09481907
EISSN: None
Source Type: Journal
DOI: 10.1002/(SICI)1521-3862(199908)5:4<191::AID-CVDE191>3.0.CO;2-U Document Type: Article |
Times cited : (8)
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References (8)
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