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Volumn 145, Issue 12, 1998, Pages 4234-4239

Chemical vapor deposition stability diagram for the Bil3-O2 system

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; MAGNESIA; SUBSTRATES; THERMAL EFFECTS; THERMODYNAMIC STABILITY; THIN FILMS;

EID: 0032300406     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838942     Document Type: Article
Times cited : (17)

References (31)
  • 11
    • 11744388717 scopus 로고    scopus 로고
    • Eur. Pat. 0 353 461 B1 (1993)
    • G. A. Neuman, Eur. Pat. 0 353 461 B1 (1993).
    • Neuman, G.A.1
  • 27
    • 0004230914 scopus 로고
    • NBS Reference Data Series 37, National Bureau of Standards, U.S. Department of Commerce, Washington, DC
    • D. R. Stull and H. Prophet, JANAF Thermodynamic Tables, 2nd ed., in NBS Reference Data Series 37, National Bureau of Standards, U.S. Department of Commerce, Washington, DC (1971).
    • (1971) JANAF Thermodynamic Tables, 2nd Ed.
    • Stull, D.R.1    Prophet, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.