Formation of highly oriented diamond film on (100) silicon

Journal of Applied Physics

Volumn 81, Issue 8, 1997, Pages 3660-3666

  Kim, Yoon Kee ^a,b   Lee, Jai Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Institute for Advanced Engineering (IAE)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001034688     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365486     Document Type: Article

References (39)

1. The Properties of Diamond, edited by J. E. Field (Academic, London, 1979).
2. K. Bigelow, Proceedings of the 2nd International Conference on the Application of Diamond Films and Related Materials, Tokyo, 1993, edited by M. Yoshikawa, M. Murakawa, Y. Tzeng, and W. A. Yarbrough (unpublished), p. 5.
3. S. Yugo, T. Kanal, T. Kimura, and T. Muto, Appl. Phys. Lett 58, 1036 (1991).
4. X. Jiang, C.-P. Klages, M. Rösler, R. Zachai, M. Hartweg, and H. J. Füsser, Appl. Phys. A 57, 483 (1993).
5. B. R. Stoner, S. R. Sahaida, J. P. Bade, R. Southworth, and P. J. Ellis, J. Mater. Res. 8, 1334 (1993).
6. S. D. Walter, B. R. Stoner, J. T. Glass, P. J. Ellis, D. S. Buhaenko, C. E. Jenkins, and P. Southworth, Appl. Phys. Lett. 62, 1215 (1993).
7. X. Jiang, E. Boettger, M. Paul, and C.-P. Klages, Appl. Phys. Lett. 65, 1519 (1994).
8. H. Maeda, M. Irie, T. Hino, K. Kusakabe, and S. Morooka, J. Mater. Res. 10, 158 (1995).
9. P. John, D. K. Milne, P. G. Roberts, M. G. Jubber, M. Liehr, and J. J. B. Wilson, J. Mater. Res. 9, 3083 (1994).
10. Y. K. Kim, K. Y. Lee, and J. Y. Lee, Appl. Phys. Lett. 68, 756 (1996).
11. B. W. Sheldon, R. Csencsits, J. Rankin, R. E. Boekenhauer, and Y. Shigesato, J. Appl. Phys. 75, 5001 (1994).
12. B. R. Stoner, G-H. M. Ma, S. D. Walter, and J. T. Glass, Phys. Rev. B 45, 11067 (1992).
13. J. Robertson, J. Gerber, S. Sattel, M. Weiler, K. Jung, and H. Ehrhardt, Appl. Phys. Lett. 66, 3287 (1995).
14. T. Suesada, N. Nakamura, H. Nagasawa, and H. Kawarada, Jpn. J. Appl. Phys. 1 34, 4898 (1995).
15. S. P. McGinnis, M. A. Kelly, and S. B. Hagström, Appl. Phys. Lett. 66, 3117 (1995).
16. S. P. McGinnis, M. A. Kelly and, and S. B. Hagström, presented at the 4th International Symposium on Diamond Materials; ECS Spring Meeting. Reno, NV, May 21-6, 1995 (unpublished).
17. J. C. Angus and C. C. Hayman, Science 241, 913 (1988).
18. Y. Saito, K. Sato, H. Tanaka, K. Fujita, and S. Matsuda, J. Mater. Sci. 23, 842 (1988).
19. M. Frenklach and H. Wang, Phys. Rev. B 43, 1520 (1991).
20. K. E. Spear, J. Am. Ceram. Sci. 72, 171 (1989).
21. M. Frenklach and K. E. Spear, J. Mater. Res. 3, 133 (1988).
22. H. R. Thorsheim and J. E. Butler, Synthetic Diamond: Emerging CVD Science and Technology, edited by K. E. Spear and J. P. Dismukes (Wiley, New York, 1994), p. 193.
23. K. E. Spear and M. Frenklach, in Ref. 22, p. 243.
24. B. R. Stoner, B. E. Williams, S. D. Woher, K. Nishimura, and J. T. Glass, J. Mater. Res. 7, 257 (1992).
25. C. J. Chen, L. Chang, T. S. Lin, and F. R. Chen, J. Mater. Res. 11, 1002 (1996).
26. Y. Shigesato, R. E. Boekenhauer, and B. W. Sheldon, Appl. Phys. Lett. 63, 314 (1993).
27. Y. K. Kim, K. Y. Lee, and J. Y. Lee, Thin Solid Films 272, 64 (1996).
28. B. R. Stoner and J. T. Glass, Appl. Phys. Lett 60, 698 (1992).
29. A. R. Striganov and N. S. Sventitskii, Tables of spectral lines of neutral and ionized atoms, Plenum Data Corporation, IFI, New York (1968).
30. R. W. B. Pearse and A. G. Gaydon, The Identification of Molecular Spectra, (Wiley, New York, 1950).
31. W. A. Weimer, F. M. Cerio, and C. E. Johnson, J. Mater. Res. 6, 2134 (1991).
32. H. Toyoda, M. A. Childs, K. L. Menningen, L. W. Anderson, and J. E. Lawler, J. Appl. Phys. 75, 3142 (1994).
33. G. Balestrino, M. Marinelli, E. Milani, A. Paoletti, I. Pinter, A. Tebano, and P. Paroli, Appl. Phys. Lett. 62, 879 (1993).
34. N. Setaka, in Ref. 22, p. 243.
35. R. Fantoni, M. Giorgi, A. G. G. Moliterni, W. C. M. Berden, V. Lazic, O. Martini, and F. P. Mattior, J. Mater. Res. 7, 1204 (1992).
36. S. W. Reeve and W. A. Weimer, Thin Solid Films 236, 91 (1993).
37. F. J. Kampas, J. Appl Phys. 54, 2276 (1983).
38. A. Campargue, L. Fayette, B. Marcus, M. Chenevier, M. Mermoux, and A. Rossi, Appl. Phys. Lett. 62, 134 (1993).
39. N. Setaka, in Ref. 12, p. 57.