High voltage electron beam nanolithography on WO3

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 4283-4287

  Carcenac, F ^a   Vieu, C ^a   Haghiri Gosnet, A M ^a   Simon, G ^a   Mejias, M ^a   Launois, H ^a  

^a Lab Microstructures Microlectron   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001019461     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588591     Document Type: Article

References (13)

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