On the methodology of numerical etching

Materials Research Society Symposium - Proceedings

Volumn 563, Issue , 1999, Pages 243-248

  Wang, X H ^a   Shyu, K ^a   Chang, C T ^a   Zheng, D W ^b   Weijia, W E N ^b  

^a Microstress Technology   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSTRUCTURE; NUMERICAL ANALYSIS; RESIDUAL STRESSES; STRESS CONCENTRATION; THIN FILMS;

NUMERICAL ETCHING;

ELECTRIC CONTACTS;

EID: 0033284604     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-563-243     Document Type: Article

References (12)

1. G.G. Stoney, Proc. Royal Soc. A82, 172 (1909).
2. S.G. Malhotra, Z.U. Rek, S.M. Yalisove, and J.C. Bilello, J. Appl. Phys. 79(9), 1996.
3. M.A. Marcus, K.E. Lutterodt, e.d. Isaacs, Presentation at Mater. Res. Soc. Spring meeting, San Fransico, 1998.
4. M.F. Doerner, Ph.D dissertation, Stanford Univ., 1987.
5. Th. Englert and G. Abstreiter, Solid-State Electronics 23, 31(1980).
6. K. Ajito, J.P. H. Sukamto, L.A. Nagahara, K. Hashimoto, and A. Fujishima, J. Vac. Sci. Technol. Technol. A13(3), 1234(1995).
7. Y. Okada and S.-I. Nakajima, Appl. Phys. Lett. 59(9), 1066(1991).
8. G. Shi, Block System Modeling by Discontinuous Deformation Analysis (Computational Mechanics Publications, Southampton, UK and Boston, USA, 1993).
9. K. Shyu, "Nodal Based Discontinuous Deformation Analysis," Ph.D dissertation, Department of Civil Engineering, University of California at Berkeley, 1993.
10. C.-T. Chang, "Nonlinear Dynamic Discontinuous Deformation Analysis with Finite Element Meshed Block System", Ph.D dissertation, Department of Civil Engineering, University of California at Berkeley, 1994.
11. Xie Ru Biao, Jiang Pei Qing, "Nonlinear Numerical Analysis," Shang Hai Jiao Tong university press, 1984.
12. D. W. Zheng, Xinhua Wang, K. Shyu, C.-T. Chang, Y. Guo, B. Sarihan, Weijia Wen, and K. N. Tu, "A Study of Local Stress Using Stress-absorbing Si Diaphragm," 1999 (unpublished).