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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3009, Issue , 1997, Pages 141-150

Microfabricated biaxial electrostatic torsional scanning mirror

(2) Dickensheets, David L a Kino, Gordon S a

a STANFORD UNIVERSITY (United States)

Author keywords

Biaxial mirror; Fiber confocal microscope; Microfabricated mirror; Miniature confocal microscope; Torsional scan mirror

Indexed keywords

COMPOSITE MICROMECHANICS; MACHINING; MICROFABRICATION; MICROMACHINING; MICROMETERS; MICROSCOPES; NITRIDES; SCANNING; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; SILICON WAFERS; THICKNESS MEASUREMENT; WAFER BONDING;

BIAXIAL MIRROR; FIBER CONFOCAL MICROSCOPE; MICROFABRICATED MIRROR; MINIATURE CONFOCAL MICROSCOPE; TORSIONAL SCAN MIRROR;

MIRRORS;

EID: 0000944108 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.271223 Document Type: Conference Paper

Times cited : (13)

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