Micromachined confocal optical microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2655, Issue , 1996, Pages 79-85

  Dickensheets, David L ^a   Kino, Gordon S ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONFOCAL OPTICAL MICROSCOPES; NUMERICAL APERTURE; TORSIONAL MIRRORS;

FABRICATION; FIBER OPTICS; MICROMACHINING; MIRRORS; REAL TIME SYSTEMS; RESOLVING POWER; SCANNING; SEMICONDUCTING SILICON;

MICROSCOPES;

EID: 0029709929     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)