메뉴 건너뛰기




Volumn 40, Issue 12, 2001, Pages 1974-1978

Precision measurement of wavelengths emitted by a molecular fluorine laser at 157 nm

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTRIC POTENTIAL; FLUORINE; OPTICAL BEAM SPLITTERS; REFRACTIVE INDEX; SPECTROGRAPHS; STANDARDS;

EID: 0000922875     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.001974     Document Type: Article
Times cited : (28)

References (15)
  • 2
    • 0002623728 scopus 로고    scopus 로고
    • 157 nm optical lithography: The accomplishments and the challenges
    • J. A. McClay and A. S. L. McIntyre, “157 nm optical lithography: the accomplishments and the challenges,” Solid State Technol. 42, 57-68 (1999).
    • (1999) Solid State Technol , vol.42 , pp. 57-68
    • McClay, J.A.1    McIntyre, A.S.L.2
  • 4
    • 0027652489 scopus 로고
    • Output characteristics of a discharge-pumped F2 laser (157 nm) with an injection-seeded unstable resonator
    • 2 laser (157 nm) with an injection-seeded unstable resonator,” J. Appl. Phys. 74, 2241-2246 (1983).
    • (1983) J. Appl. Phys. , vol.74 , pp. 2241-2246
    • Kakehata, M.1    Yang, C.-H.2    Ueno, Y.3    Kannari, F.4
  • 5
    • 0028096396 scopus 로고
    • Progress in vacuum ultraviolet lasers
    • S. M. Hooker and C. E. Webb, “Progress in vacuum ultraviolet lasers,” Prog. Quantum Electron. 18, 227-274 (1994).
    • (1994) Prog. Quantum Electron. , vol.18 , pp. 227-274
    • Hooker, S.M.1    Webb, C.E.2
  • 7
    • 85010103178 scopus 로고    scopus 로고
    • Commercial products are identified in this paper for adequate specification of the experimental procedure. This identification does not imply recommendation or endorsement by NIST
    • Commercial products are identified in this paper for adequate specification of the experimental procedure. This identification does not imply recommendation or endorsement by NIST.
  • 8
    • 0004320089 scopus 로고    scopus 로고
    • CRC Press, Boca Raton, Fla, and in earlier versions of this table as being wavelengths in air. However, these values clearly represent wavelengths in vacuum
    • M. J. Weber, Handbook of Laser Wavelengths (CRC Press, Boca Raton, Fla., 1999) and in earlier versions of this table as being wavelengths in air. However, these values clearly represent wavelengths in vacuum.
    • (1999) Handbook of Laser Wavelengths
    • Weber, M.J.1
  • 9
    • 0022011013 scopus 로고
    • Spectral-narrowing techniques for excimer laser oscillators
    • T. J. McKee, “Spectral-narrowing techniques for excimer laser oscillators,” Can. J. Phys. 63, 214-219 (1985).
    • (1985) Can. J. Phys. , vol.63 , pp. 214-219
    • McKee, T.J.1
  • 10
    • 85010174380 scopus 로고    scopus 로고
    • National Research Council of Canada, Ottowa, Ontario (personal communication, March
    • K. P. Huber, Steacie Institute for Molecular Science, National Research Council of Canada, Ottowa, Ontario (personal communication, March 2000).
    • (2000) Steacie Institute for Molecular Science
    • Huber, K.P.1
  • 13
    • 0026698485 scopus 로고
    • Atlas of the spectrum of a platinum/neon hollow-cathode reference lamp in the region 1130-4330 A
    • J. E. Sansonetti, J. Reader, C. J. Sansonetti, and N. Acquista, “Atlas of the spectrum of a platinum/neon hollow-cathode reference lamp in the region 1130-4330 A,” J. Res. Natl. Inst. Stand. Technol. 97, 1-211 (1992).
    • (1992) J. Res. Natl. Inst. Stand. Technol. , vol.97 , pp. 1-211
    • Sansonetti, J.E.1    Reader, J.2    Sansonetti, C.J.3    Acquista, N.4
  • 14
    • 0012587370 scopus 로고
    • Wavelengths, energy levels, and pressure shifts in mercury 198
    • V. Kaufman, “Wavelengths, energy levels, and pressure shifts in mercury 198,” J. Opt. Soc. Am. 52, 866-870 (1962).
    • (1962) J. Opt. Soc. Am. , vol.52 , pp. 866-870
    • Kaufman, V.1
  • 15
    • 0037901693 scopus 로고
    • Wavelength shifts in Hg198 as a function of temperature
    • 198 as a function of temperature,” J. Res. Natl. Bur. Stand. Sect. A 65, 473-474 (1961).
    • (1961) J. Res. Natl. Bur. Stand. Sect. A , vol.65 , pp. 473-474
    • Emara, S.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.