Economical sampling algorithm using Fourier analysis for mapping wafer critical dimension variations

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3655-3660

  Ouyang, Xu ^a   Berglund, C N ^a   McCord, Mark A ^a   Pease, R F W ^a   Spence, Chris ^b   Liu, Hua Yu ^c  

^a Stanford University   (United States)

^b ADVANCED MICRO DEVICES   (United States)

^c HEWLETT PACKARD COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000909845     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590386     Document Type: Article

References (8)

1. H.-Y. Liu, C. Yu, and B. Gleason, J. Vac. Sci. Technol. B 13, 2909 (1995)
2. C. N. Berglund, N. I. Maluf, Jun Ye, G. Owen, R. Browning, and R. F. W. Pease, J. Vac. Sci. Technol. B 10, 2633 (1992).
3. B. E. Stine, D. S. Boning, and J. E. Chung, IEEE Trans. Semicond. Manuf. 10, 24 (1997).
4. R. N. Bracewell, The Fourier Transform and Its Applications (McGraw-Hill, New York, 1986).
5. J. Ye, C. N. Berglund, J. Robinson, and R. F. W. Pease, IEEE Trans. Semicond. Manuf. 8, 319 (1995).
6. L. Han, W. Wang, M. A. McCord, C. N. Berglund, R. F. W. Pease, and L. Suzanne Weaver, J. Vac. Sci. Technol. B 15, 2243 (1997).
7. C. Yu, T. Maung, C. Spanos, D. Boning, J. Cheung, H. Liu, K. Chang, and D. Bartelink, IEEE Trans. Semicond. Manuf. 8, 150 (1995).
8. A. V. Oppenheim and R. W. Schafer, Discrete-Time Signal Processing (Prentice-Hall, Englewood Cliffs, NJ, 1989).