High-speed Si/SiGe technology for next generation wireless system applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1541-1548

  Larson, Lawrence E ^a  

^a University of California at San Diego   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000888919     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589936     Document Type: Article

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