Annealing kinetics and reversibility of stress-induced leakage current in thin oxides

Applied Physics Letters

Volumn 72, Issue 23, 1998, Pages 3041-3043

  Riess, P ^a   Ghibaudo, G ^a   Pananakakis, G ^a   Brini, J ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000806458     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121534     Document Type: Article

References (11)

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