Dislocation-related luminescence in Er-implanted silicon

Journal of Luminescence

Volumn 80, Issue 1-4, 1998, Pages 357-361

  Sobolev, N A ^a   Gusev, O B ^a   Shek, E I ^a   Vdovin, V I ^b   Yugova, T G ^b   Emel'yanov, A M ^c  

^a IOFFE INSTITUTE   (Russian Federation)

^b Inst Chem Prob of Microlectron   (Russian Federation)

^c PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

Defect; Erbium; Implantation; Photoluminescence; Silicon

Indexed keywords

EID: 0000740451     PISSN: 00222313     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-2313(98)00129-X     Document Type: Article

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