HIGH-PRECISION, HIGH-PERFORMANCE MASS-FLOW SENSOR WITH INTEGRATED LAMINAR FLOW MICRO-CHANNELS.

Volumn , Issue , 1985, Pages 361-363

  Petersen, Kurt ^a   Brown, Joseph ^a   Renken, Wayne ^a  

^a Transensory Devices   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC CIRCUITS, BRIDGE - APPLICATIONS; SILICON AND ALLOYS - ETCHING;

MASS FLOW SENSOR; MICROMECHANIAL SENSOR CHIP;

FLOWMETERS;

EID: 0022327261     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)