Scanning force microscope using piezoelectric excitation and detection

IEICE Transactions on Electronics

Volumn E78-C, Issue 2, 1995, Pages 146-151

  Itoh, Toshihiro ^a   Ohashi, Takahiro ^a   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATING CURRENT VOLTAGE; PIEZOELECTRIC CANTILEVER; PIEZOELECTRIC EXCITATION/DETECTION; SCANNING FORCE MICROSCOPE;

ELECTRODES; NATURAL FREQUENCIES; OSCILLATORS (MECHANICAL); PERMITTIVITY; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SILICA; SURFACE MEASUREMENT; VIBRATIONS (MECHANICAL); ZINC OXIDE;

MICROSCOPES;

EID: 0029252267     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)