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Volumn E78-C, Issue 2, 1995, Pages 139-145
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AlGaAs/GaAs micromachining for monolithic integration of micromechanical structures with laser diodes
a
a
NTT CORPORATION
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
CANTILEVER BEAM STRUCTURE;
INTEGRATED SENSORS;
MICROELECTRO-MECHANICAL SYSTEMS;
MICROMECHANICAL STRUCTURES;
MONOLITHIC INTEGRATION;
PEROXIDE/AMMONIUM HYDROXIDE SOLUTION;
REACTIVE DRY ETCHING;
SACRIFICIAL LAYERS;
SELECTIVE WET ETCHING;
CHLORINE;
DRY ETCHING;
EPITAXIAL GROWTH;
ETCHING;
INTEGRATED OPTICS;
MICROELECTROMECHANICAL DEVICES;
MICROSTRUCTURE;
OPTICAL SENSORS;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTOR LASERS;
SOLUTIONS;
THREE DIMENSIONAL;
MICROMACHINING;
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EID: 0029252346
PISSN: 09168524
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (11)
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References (18)
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