SCOPUS 정보 검색 플랫폼

Volumn 4346, Issue 2, 2001, Pages 970-981

When is bilayer thin-film imaging suitable: Comparison with single layer resists

Author keywords

Bilayer resist; Dense contact; Dual damascene; Etch selectivity; Thin film imaging; Trench planarization

Indexed keywords

ASPECT RATIO; DIELECTRIC MATERIALS; ETCHING; IMAGING TECHNIQUES; LITHOGRAPHY; MASKS;

THIN-FILM IMAGING;

THIN FILMS;

EID: 0000726246 PISSN: 0277786X EISSN: None Source Type: Journal
DOI: 10.1117/12.435797 Document Type: Article

Times cited : (6)

References (11)

1
- 0030653562
- D.E. Seeger, D.C. La Tulipe, R.R. Kunz, C.M. Garza, M.A. Hanratty, IBM J. Res. Develop., 41, 105 (1997).
- (1997) IBM J. Res. Develop. , vol.41 , pp. 105
- Seeger, D.E.¹ La Tulipe, D.C.² Kunz, R.R.³ Garza, C.M.⁴ Hanratty, M.A.⁵

2
- 0032631908
- Q. Lin, K. Petrillo, K. Babich, D.C. La Tulipe, D.R. Medeiros, A.P. Mahorowala, J. Simons, M. Angelopoulos, G. Wallraff, C.E. Larson, D. Fenzel-Alexander, R. Sooriyakumaran, G. Breyta, P. Brock, R. DiPietro, and D. Hofer, Proc. SPIE, 3678, 241 (1999).
- (1999) Proc. SPIE , vol.3678 , pp. 241
- Lin, Q.¹ Petrillo, K.² Babich, K.³ La Tulipe, D.C.⁴ Medeiros, D.R.⁵ Mahorowala, A.P.⁶ Simons, J.⁷ Angelopoulos, M.⁸ Wallraff, G.⁹ Larson, C.E.¹⁰ Fenzel-Alexander, D.¹¹ Sooriyakumaran, R.¹² Breyta, G.¹³ Brock, P.¹⁴ DiPietro, R.¹⁵ Hofer, D.¹⁶

3
- 18544377410
- K. Babich, Q. Lin, A.P. Mahorowala, D.R. Medeiros, K. Petrillo, J. Simons, M. Angelopoulos, G. Breyta, R. DiPietro, D. Fenzel-Alexander, C.E. Larson, R. Sooriyakumaran, G.M. Wallraff, and D. Hofer, Proc. Interface, (1999).
- (1999) Proc. Interface
- Babich, K.¹ Lin, Q.² Mahorowala, A.P.³ Medeiros, D.R.⁴ Petrillo, K.⁵ Simons, J.⁶ Angelopoulos, M.⁷ Breyta, G.⁸ DiPietro, R.⁹ Fenzel-Alexander, D.¹⁰ Larson, C.E.¹¹ Sooriyakumaran, R.¹² Wallraff, G.M.¹³ Hofer, D.¹⁴

4
- 84994422472
- D.R Franzen et al., Proc. SPIE, 3333, 726 (1998).
- (1998) Proc. SPIE , vol.3333 , pp. 726
- Franzen, D.R.¹

5
- 0001426922
- A.Azuma, T. Ohiwa, K. Okumura, T. Farrell, R. Nunes, D. Dobuzisnky, G. Fichtl, and A. Gutmann, J. Vac. Sci. Technol, B. 16, 4246 (1996).
- (1996) J. Vac. Sci. Technol, B. , vol.16 , pp. 4246
- Azuma, A.¹ Ohiwa, T.² Okumura, K.³ Farrell, T.⁴ Nunes, R.⁵ Dobuzisnky, D.⁶ Fichtl, G.⁷ Gutmann, A.⁸

6
- 0001352804
- K. Babich, A. Callegari, K. Petrillo, J. Simons, D. LaTulipe, M. Angelopoulos, Q. Lin, Proc. SPIE, 3333, 726 (1998).
- (1998) Proc. SPIE , vol.3333 , pp. 726
- Babich, K.¹ Callegari, A.² Petrillo, K.³ Simons, J.⁴ LaTulipe, D.⁵ Angelopoulos, M.⁶ Lin, Q.⁷

7
- 0034229491
- A.P. Mahorowala, K. Babich, Q. Lin, D.R. Medeiros, K. Petrillo, J. Simons, M. Angelopoulus, R. Sooriyakumaran, D. Hofer, G.W. Reynolds, and J.W. Taylor, J. Vac. Sci. Technol, A. 8, 1411 (2000).
- (2000) J. Vac. Sci. Technol, A. , vol.8 , pp. 1411
- Mahorowala, A.P.¹ Babich, K.² Lin, Q.³ Medeiros, D.R.⁴ Petrillo, K.⁵ Simons, J.⁶ Angelopoulus, M.⁷ Sooriyakumaran, R.⁸ Hofer, D.⁹ Reynolds, G.W.¹⁰ Taylor, J.W.¹¹

8
- 0001415175
- Q. Lin, A. Katnani, T. Brunner, C. DeWan, C. Fairchok, D.C. La Tulipe, J. Simons, K. Petrillo, K. Babich, D. Seeger, M. Angelopoulos, R. Sooriyakumaran, G.M. Wallraff, and D. Hofer, Proc. SPIE, 3333, 278 (1998).
- (1998) Proc. SPIE , vol.3333 , pp. 278
- Lin, Q.¹ Katnani, A.² Brunner, T.³ DeWan, C.⁴ Fairchok, C.⁵ La Tulipe, D.C.⁶ Simons, J.⁷ Petrillo, K.⁸ Babich, K.⁹ Seeger, D.¹⁰ Angelopoulos, M.¹¹ Sooriyakumaran, R.¹² Wallraff, G.M.¹³ Hofer, D.¹⁴

10
- 84994394360
- th Int. Symp. (2000).
- (2000) th Int. Symp.
- Keil, D.¹ Wagganer, E.² Helmer, B.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.