Airborne ultrasonic electrostatic transducers with conductive grooved backplates: Tailoring their centre frequency, sensitivity and bandwidth

Ultrasonics

Volumn 37, Issue 7, 1999, Pages 493-503

  Pizarro, Luis ^a   Certon, Dominique ^a   Lethiecq, Marc ^a   Hosten, Bernard ^b  

^a LUSSI/GIP Ultrasons   (France)

^b UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

Air coupled ultrasound; Capacitance transducer; Electrostatic transducer

Indexed keywords

EID: 0000709389     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0041-624X(99)00033-5     Document Type: Article

References (29)

1. D.W. Schindel, D.S. Forsyth, D.A. Hutchins, A. Fahr, Air-coupled ultrasonic NDE of bonded aluminium lap joints, Ultrasonics 35 (1) (1997) 1-6.
2. D.W. Schindel, D.A. Hutchins, Applications of micromachined capacitance transducers in air-coupled ultrasonics and non-destructive evaluation, IEEE Trans. UFFC 42 (1) (1995) 51-58.
3. D.W. Schindel, D.A. Hutchins, Through thickness characterisation of solids by wideband air-coupled ultrasound, Ultrasonics 33 (1) (1995) 11-17.
4. W.A. Grandia, C.M. Fortunko, NDE applications of air-coupled ultrasonic transducers, in: IEEE Ultrasonics Symposium Proceedings Seattle, USA vol. 1 (1995) 697-709.
5. B. Hosten, D.A. Hutchins, D.W. Schindel, Measurements of elastic constants in composite materials using air-coupled ultrasonic bulk waves, J. Acoust. Soc. Am. 99 (4) (1996) 2116-2123.
6. D.W. Schindel, D.A. Hutchins, L. Zou, M. Sayer, Capacitance devices for the generation of air-borne ultrasonic fields, in: IEEE Ultrasonic Symposium Proceedings Tucson, USA vol. 2 (1992) 843-846.
7. H. Carr, C. Wykes, Diagnostic measurements in capacitive transducers, Ultrasonics 31 (1) (1993) 13-20.
8. C. Wykes, H. Carr, W.S.H. Munro, F. Nagi, S. Pomeroy, M. Rafiq, Advances in air-borne ultrasonic sensors, in: Ultrasonics International Conference Proceedings Vienna, Austria (1993) 667-670.
9. H. Carr, Electrostatic transducers for airborne ultrasonics, Thesis, University of Nottingham, UK, 1989.
10. J. Hietanen, P. Mattila, J. Stor-Pellinen, F. Tsuzuki, H. Väätäjä, Factors affecting the sensitivity of electrostatic ultrasonic transducers, Meas. Sci. Technol. 4 (1993) 1138-1142.
11. P. Mattila, F. Tsuzuki, H. Väätäjä, K. Sasaki, Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates, IEEE Trans. UFFC 42 (1) (1995) 1-7.
12. J. Hietanen, J. Stor-Pellinen, M. Luukkala, A model for an electrostatic ultrasonic transducer with a grooved backplate, Meas. Sci. Technol. 3 (1992) 1095-1097.
13. P. Mattila, J. Hietanen, Bandwidth control of an electrostatic ultrasonic transducer, Sensors Actuators A: 45 (1994) 203-208.
14. J. Hietanen, J. Stor-Pellinen, M. Luukkala, P. Mattile, F. Tsuzuki, K. Sasaki, A Helmholtz resonator model for an electrostatic ultrasonic air transducer with a V-grooved backplate, Sensors Actuators A: 39 (1993) 129-132.
15. W.S.H. Munro, C. Wykes, Arrays for airborne 100kHz ultrasound, Ultrasonics 32 (1) (1994) 57-64.
16. G.J. Brown, D. Reilly, Ultrasonic tomographic imaging of solid objects in air using an array of fan-shaped-beam electrostatic transducers, Ultrasonics 34 (2-5) (1996) 111-115.
17. A.G. Bashford, D.W. Schindel, D.A. Hutchins, Micromachined ultrasonic capacitance transducers for immersion applications, IEEE Trans. UFFC 45 (2) (1998) 367-375.
18. D.W. Schindel, D.A. Hutchins, Capacitance devices for the controlled generation of ultrasonic fields in liquids, in: IEEE Ultrasonics Symposium Proceedings Florida, USA vol. 1 (1991) 301-304.
19. A.G. Bashford, D.W. Schindel, D.A. Hutchins, Characteristics of ultrasonic micromachined capacitance transducers in water, in: IEEE Ultrasonics Symposium Proceedings San Antonio, USA vol. 2 (1996) 955-958.
20. M.J. Anderson, J.A. Hill, C.M. Fortunko, N.S. Dogan, R.D. Moore, Broadband electrostatic transducers: modelling and experiments, J. Acoust. Soc. Am. 97 (1) (1995) 262-272.
21. M.I. Haller, B.T. Khuri-Yakub, A surface micromachined electrostatic ultrasonic air transducer, IEEE Trans. UFFC 43 (1) (1996) 1-6.
22. D.W. Schindel, D.A. Hutchins, L. Zou, M. Sayer, The design and characterization of micromachined air-coupled capacitance transducers, IEEE Trans. UFFC 42 (1) (1995) 42-50.
23. C. Thielemann, G.M. Sessler, Capacitive silicon sensors for ultrasound, Acustica 83 (1997) 715-720.
24. A.G. Bashford, D.A. Hutchins, D.W. Schindel, Radiated fields of an air-coupled ultrasonic capacitance transducer, Ultrasonics 34 (2-5) (1996) 169-172.
25. K. Suzuki, K. Higuchi, H. Tanigawa, A silicon electrostatic ultrasonic transducer, IEEE Trans. UFFC 36 (6) (1989) 620-627.
26. P.C. Eccardt, K. Niederer, B. Fischer, Micromachined transducers for ultrasound applications, in: IEEE Ultrasonics Symposium Proceedings Toronto, Canada vol. 2 (1997) 1609-1618.
27. I. Ladabaum, X. Jin, H.T. Soh, A. Atalar, B.T. Khuri-Yakub, Surface micromachined capacitive ultrasonic transducers, IEEE Trans. UFFC 45 (3) (1998) 678-690.
28. P. Morse, K. Uno, Theoretical Acoustics, Princeton University Press, 1986.
29. L. Kinsler, A. Frey, A. Coppens, J. Sanders, Fundamentals of Acoustics, 3rd edition, Wiley, 1982.