Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors

Applied Optics

Volumn 36, Issue 7, 1997, Pages 1650-1654

  Stock, H J ^b   Hamelmann, F ^b   Kleineberg, U ^b   Menke, D ^b   Schmiedeskamp, B ^b   Osterried, K ^c   Heidemann, K F ^a   Heinzmann, U ^b  

^a Universitat Bielefeld ^*

^b BIELEFELD UNIVERSITY   (Germany)

^c CARL ZEISS SMT AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000750595     PISSN: 00036935     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.36.001650     Document Type: Article

References (23)

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