Aluminum titanium nitride films grown with multiple precursors

Materials Science in Semiconductor Processing

Volumn 2, Issue 3, 1999, Pages 253-261

  Sun, Y M ^a   Endle, J P ^b   Ekerdt, J G ^b   Russell, N M ^c   Healy, M D ^d   White, J M ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^b The University of Texas at Austin   (United States)

^c TEXAS INSTRUMENTS   (United States)

^d Schumacher   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000575774     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(99)00021-9     Document Type: Article

References (17)

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