Solarization of AlF3-based fluoride glasses for VUV optics by ArF excimer laser irradiation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3424, Issue , 1998, Pages 146-156

  Hosono, Hideo ^a   Ichimura, Tomoaki ^b   Mizuguchi, Masafumi ^a   Hiroshi Kawazoe, ^a   Shinkuma, Yoshikane ^c   Watanabe, Yuichi ^b   Ogawa, Tohru ^d  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b TOKYO UNIVERSITY OF SCIENCE   (Japan)

^c HOYA CORPORATION   (Japan)

^d SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC   (Japan)

Author keywords

ArF excimer laser; Color centers; Fluoride glasses; Fluorophosphate glasses; Solarization

Indexed keywords

ALUMINUM COMPOUNDS; COLOR CENTERS; DOPING (ADDITIVES); GLASS; IRRADIATION; LIGHT ABSORPTION; PARAMAGNETIC RESONANCE; PHOTONS;

SOLARIZATION;

EXCIMER LASERS;

EID: 0000532217     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.323760     Document Type: Conference Paper

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