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Volumn 35, Issue 12 B, 1996, Pages 6347-6695
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Fluoride glasses for 193 nm optics
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRONS;
EXCIMER LASERS;
FLUORINE COMPOUNDS;
FUSED SILICA;
LIGHT ABSORPTION;
LIGHT REFLECTION;
OPTICS;
OXIDATION;
PHOTOLITHOGRAPHY;
ULTRAVIOLET RADIATION;
VACUUM;
ALUMINUM FLUORIDE;
ELECTRON TRAPPED CENTERS;
FLUORIDE GLASSES;
FLUOROPHOSPHATE GLASS;
INDUCED ABSORPTION;
PHOTOINDUCED OXIDATION;
SOLARIZATION;
GLASS;
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EID: 0030380388
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Review |
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Times cited : (1)
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References (7)
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