Edge diffraction enhanced printability in x-ray nanolithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3521-3525

  Chen, Y ^a   Simon, G ^a   Haghiri Gosnet, A M ^a   Carcenac, F ^a   Decanini, D ^a   Rousseaux, F ^a   Launois, H ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008134227     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590489     Document Type: Article

References (13)

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