Fabrication of in situ Ohmic contacts patterned in three dimensions using a focused ion beam during molecular beam epitaxial growth

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2337-2341

  Sazio, P J A ^a   Jones, G A C ^a   Linfield, E H ^a   Ritchie, D A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000449225     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589641     Document Type: Article

References (12)

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