Stray-light effects of diffractive beam-shaping elements in optical microsystems

Applied Optics

Volumn 38, Issue 14, 1999, Pages 3068-3076

  Rossi, Markus ^a   Hessler, Thomas ^a,b  

^a CSEM   (Switzerland)

^b Leister Process Technologies   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000351269     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.003068     Document Type: Article

References (16)

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