Three-dimensional vacuum magnetic sensor with a Si emitter tip

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1233-1235

  Itoh, Junji ^a   Uemura, Koji ^a,b   Kanemaru, Seigo ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

^b YASKAWA ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000301856     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589990     Document Type: Article

References (9)

1. J. Itoh, Appl. Surf. Sci. 111, 194 (1997).
2. Y. Sugiyama, J. Vac. Sci. Technol. B 13, 1075 (1995).
3. D. Nicolaescu and V. Filip, Appl. Surf. Sci. 94/95, 87 (1996).
4. K. Uemura, S. Kanemaru, and J. Itoh, Jpn. J. Appl. Phys., Part 1 35, 6629 (1996).
5. C. Py, J. Itoh, T. Hirano, and S. Kanemaru, IEEE Trans. Electron Devices 44, 498 (1997).
6. J. Itoh, T. Hirano, and S. Kanemaru, Appl. Phys. Lett. 69, 1577 (1996).
7. S. Kanemaru, T. Hirano, H. Tanoue, and J. Itoh, Appl. Surf. Sci. 111, 218 (1997).
8. Y. Yokoo, M. Arai, M. Mori, J. Bae, and S. Ono, J. Vac. Sci. Technol. B 13, 491 (1995).
9. K. Uemura, S. Kanemaru, and J. Itoh, Jpn. J. Appl. Phys., Part 1 36, 7754 (1997).